Improved epitaxy of barium titanate by molecular beam epitaxy through a single crystalline magnesium oxide template for integration on hexagonal silicon carbide

T. L. Goodrich, Z. Cai, M. D. Losego, J. P. Maria, L. Fitting Kourkoutis, D. A. Muller, K. S. Ziemer

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8 Scopus citations

Abstract

Crystalline MgO(111) has the potential to be an effective template for the heteroepitaxial integration of BTO(111) and other functional oxides on 6H-SiC (0001). Deposition of MgO on 6H-SiC (0001) at 140 °C resulted in a twinned structure with only (111) orientation. By heating the MgO(111) after deposition to 650 °C at a background pressure of 1.0× 10-9 Torr or depositing the MgO at 650 °C, the twinned structure can be minimized, resulting in a reflection high energy electron diffraction (RHEED) pattern characteristic of random epitaxial islands. The use of a 2 nm MgO(111) template layer proved optimal for deposition of crystalline BTO(111) by molecular beam epitaxy on 6H-SiC (0001). The BTO was found to be twinned with a 60° in-plane rotation. The grain formation of the BTO resulted in a transmission dominated RHEED pattern. Deposition of BTO at a higher substrate temperature resulted in large grain formation, 50 nm in size, but an increased surface roughness of 1.4±0.1 nm over a 1 μm 2 area. In order to integrate BTO in a multiferroic device with multilayers of BTO(111) and hexagonal ferrites, it will be necessary to optimize the processing conditions to establish a smoother BTO surface for the subsequent heteroepitaxy of the magnetic film.

Original languageEnglish (US)
Pages (from-to)1110-1114
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume26
Issue number3
DOIs
StatePublished - 2008

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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