Improved epitaxy of barium titanate by molecular beam epitaxy through a single crystalline magnesium oxide template for integration on hexagonal silicon carbide

T. L. Goodrich, Z. Cai, M. D. Losego, Jon-Paul Maria, L. Fitting Kourkoutis, D. A. Muller, K. S. Ziemer

Research output: Contribution to journalArticle

8 Scopus citations


Crystalline MgO(111) has the potential to be an effective template for the heteroepitaxial integration of BTO(111) and other functional oxides on 6H-SiC (0001). Deposition of MgO on 6H-SiC (0001) at 140 °C resulted in a twinned structure with only (111) orientation. By heating the MgO(111) after deposition to 650 °C at a background pressure of 1.0× 10-9 Torr or depositing the MgO at 650 °C, the twinned structure can be minimized, resulting in a reflection high energy electron diffraction (RHEED) pattern characteristic of random epitaxial islands. The use of a 2 nm MgO(111) template layer proved optimal for deposition of crystalline BTO(111) by molecular beam epitaxy on 6H-SiC (0001). The BTO was found to be twinned with a 60° in-plane rotation. The grain formation of the BTO resulted in a transmission dominated RHEED pattern. Deposition of BTO at a higher substrate temperature resulted in large grain formation, 50 nm in size, but an increased surface roughness of 1.4±0.1 nm over a 1 μm 2 area. In order to integrate BTO in a multiferroic device with multilayers of BTO(111) and hexagonal ferrites, it will be necessary to optimize the processing conditions to establish a smoother BTO surface for the subsequent heteroepitaxy of the magnetic film.

Original languageEnglish (US)
Pages (from-to)1110-1114
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number3
StatePublished - Jun 9 2008


All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this