Improvement of the elastic modulus of micromachined structures using carbon nanotubes

Prasoon Joshi, Abhijat Goyal, Awnish Gupta, Srinivas A. Tadigadapa, Peter C. Eklund

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

It has been shown that the addition of single walled carbon nanotubes (SWNTs) cause an increase in the resonance frequency of micromachined clamped-clamped structures. This is believed to be due to an increase in the effective stiffness of the micromachined structures due to the high Young's modulus of carbon nanotubes. These results were obtained in spite of a relatively poor control over the orientation and aerial density of the deposited SWNTs. Finite element simulations showed an increase in the resonance frequency of up to ∼25% for the simulated devices. This increase in the resonance frequency of the bridges can be attributed to the high Young's modulus (∼1TPa) of the carbon nanotubes.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
DOIs
StatePublished - May 4 2006
EventReliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - San Jose, CA, United States
Duration: Jan 25 2006Jan 26 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6111
ISSN (Print)0277-786X

Other

OtherReliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
CountryUnited States
CitySan Jose, CA
Period1/25/061/26/06

Fingerprint

Carbon Nanotubes
Resonance Frequency
Elastic Modulus
Nanotubes
Carbon nanotubes
modulus of elasticity
Carbon
Single-walled Carbon Nanotubes
Elastic moduli
carbon nanotubes
Young's Modulus
Single-walled carbon nanotubes (SWCN)
clamped structures
Finite Element Simulation
Stiffness
Antennas
stiffness
causes
simulation

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Joshi, P., Goyal, A., Gupta, A., Tadigadapa, S. A., & Eklund, P. C. (2006). Improvement of the elastic modulus of micromachined structures using carbon nanotubes. In Proceedings of SPIE - The International Society for Optical Engineering [611107] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6111). https://doi.org/10.1117/12.657674
Joshi, Prasoon ; Goyal, Abhijat ; Gupta, Awnish ; Tadigadapa, Srinivas A. ; Eklund, Peter C. / Improvement of the elastic modulus of micromachined structures using carbon nanotubes. Proceedings of SPIE - The International Society for Optical Engineering. 2006. (Proceedings of SPIE - The International Society for Optical Engineering).
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abstract = "It has been shown that the addition of single walled carbon nanotubes (SWNTs) cause an increase in the resonance frequency of micromachined clamped-clamped structures. This is believed to be due to an increase in the effective stiffness of the micromachined structures due to the high Young's modulus of carbon nanotubes. These results were obtained in spite of a relatively poor control over the orientation and aerial density of the deposited SWNTs. Finite element simulations showed an increase in the resonance frequency of up to ∼25{\%} for the simulated devices. This increase in the resonance frequency of the bridges can be attributed to the high Young's modulus (∼1TPa) of the carbon nanotubes.",
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Joshi, P, Goyal, A, Gupta, A, Tadigadapa, SA & Eklund, PC 2006, Improvement of the elastic modulus of micromachined structures using carbon nanotubes. in Proceedings of SPIE - The International Society for Optical Engineering., 611107, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, San Jose, CA, United States, 1/25/06. https://doi.org/10.1117/12.657674

Improvement of the elastic modulus of micromachined structures using carbon nanotubes. / Joshi, Prasoon; Goyal, Abhijat; Gupta, Awnish; Tadigadapa, Srinivas A.; Eklund, Peter C.

Proceedings of SPIE - The International Society for Optical Engineering. 2006. 611107 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6111).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Joshi P, Goyal A, Gupta A, Tadigadapa SA, Eklund PC. Improvement of the elastic modulus of micromachined structures using carbon nanotubes. In Proceedings of SPIE - The International Society for Optical Engineering. 2006. 611107. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.657674