Improvement of the elastic modulus of micromachined structures using carbon nanotubes

Prasoon Joshi, Abhijat Goyal, Awnish Gupta, Srinivas A. Tadigadapa, Peter C. Eklund

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

It has been shown that the addition of single walled carbon nanotubes (SWNTs) cause an increase in the resonance frequency of micromachined clamped-clamped structures. This is believed to be due to an increase in the effective stiffness of the micromachined structures due to the high Young's modulus of carbon nanotubes. These results were obtained in spite of a relatively poor control over the orientation and aerial density of the deposited SWNTs. Finite element simulations showed an increase in the resonance frequency of up to ∼25% for the simulated devices. This increase in the resonance frequency of the bridges can be attributed to the high Young's modulus (∼1TPa) of the carbon nanotubes.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
DOIs
StatePublished - May 4 2006
EventReliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - San Jose, CA, United States
Duration: Jan 25 2006Jan 26 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6111
ISSN (Print)0277-786X

Other

OtherReliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
CountryUnited States
CitySan Jose, CA
Period1/25/061/26/06

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Joshi, P., Goyal, A., Gupta, A., Tadigadapa, S. A., & Eklund, P. C. (2006). Improvement of the elastic modulus of micromachined structures using carbon nanotubes. In Proceedings of SPIE - The International Society for Optical Engineering [611107] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6111). https://doi.org/10.1117/12.657674