Improving leakage currents of Pt/Ba0.8Sr0.2TiO3/Pt capacitors using multilayered structures

Yanyan Zhu, Mingrong Shen, Run Xu, Wenwu Cao

Research output: Contribution to journalArticle

5 Scopus citations

Abstract

Pt/Ba0.8Sr0.2TiO3 (BST)/Pt capacitors fabricated by the sol-gel process generally show abnormally high leakage currents. In this paper, we report the reduction of this leakage current in multilayered sol-gel Pt/BST/Pt thin film capacitors. The multilayered structure also provided the flexibility of adjusting the dielectric constant of the film. The thin films were fabricated by a step-by-step annealing scheme at 750 °C except that the top and bottom layers were annealed at less than 750 °C. The observed results are explained by an amorphous/polycrystalline structure, which was confirmed by scanning electron microscopy and X-ray diffraction analysis.

Original languageEnglish (US)
Pages (from-to)277-281
Number of pages5
JournalSurface and Coatings Technology
Volume160
Issue number2-3
DOIs
StatePublished - Oct 22 2002

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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