In situ investigation of crystallization kinetics in PZT films by light scattering

V. Ya Shur, S. A. Negashev, A. L. Subbotin, E. A. Borisova, S. Trolier-McKinstry

Research output: Contribution to journalConference articlepeer-review

5 Scopus citations

Abstract

This paper presents the in situ investigation of the crystallite evolution/growth during annealing of amorphous sol-gel Pb(Zr,Ti)O3 thin films by elastic light scattering. XRD and SEM measurements of partly crystallized films of crystallite evolution were used for verifying the method.

Original languageEnglish (US)
Pages (from-to)351-356
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume433
DOIs
StatePublished - 1996
EventProceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA
Duration: Apr 7 1996Apr 12 1996

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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