In-situ vapor phase lubrication of MEMS devices

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The basic principles, potentials, and challenges of the insitu vapor phase lubrication will be addressed in the MEMS panel discussion.

Original languageEnglish (US)
Title of host publication2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007
Pages883-884
Number of pages2
DOIs
StatePublished - May 19 2008
Event2007 ASME/STLE International Joint Tribology Conference, IJTC 2007 - San Diego, CA, United States
Duration: Oct 22 2007Oct 24 2007

Publication series

Name2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007
VolumePART B

Other

Other2007 ASME/STLE International Joint Tribology Conference, IJTC 2007
CountryUnited States
CitySan Diego, CA
Period10/22/0710/24/07

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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  • Cite this

    Kim, S. H. (2008). In-situ vapor phase lubrication of MEMS devices. In 2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007 (pp. 883-884). (2007 Proceedings of the ASME/STLE International Joint Tribology Conference, IJTC 2007; Vol. PART B). https://doi.org/10.1115/IJTC2007-44418