In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation

Giovanni Esteves, Chris M. Fancher, Margeaux Wallace, Raegan Johnson-Wilke, Rudeger H.T. Wilke, Susan E. Trolier-McKinstry, Ronald G. Polcawich, Jacob L. Jones

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Synchrotron X-ray diffraction (XRD) was used to probe the electric-field-induced response of a 500 nm lead zirconate titanate (52/48, Zr/Ti) (PZT) based piezoelectric microelectromechanical system (piezoMEMS) device. 90° ferroelectric/ferroelastic domain reorientation was observed in a cantilever comprised of a 500 nm thick PZT film on a 3 μm thick elastic layer composite of SiO2 and Si3N4. Diffraction data from sectors both parallel- and perpendicular-to-field showed the presence of ferroelastic texture, which is typically seen in in situ electric field diffraction studies of bulk tetragonal perovskite ferroelectrics. The fraction of domains reoriented into the field direction was quantified through the intensity changes of the 002 and 200 diffraction profiles. The maximum induced volume fraction calculated from the results was 20%, which is comparable to values seen in previous bulk and thin film ferroelectric diffraction studies. The novelty of the present work is that a fully released ferroelectric thin film device of micron scale dimensions (down to 60,000 μm3) was interrogated in situ with an applied electric field using synchrotron XRD. Furthermore, the experiment demonstrates that 90° ferroelectric/ferroelastic domain reorientation can be characterized in samples of such small dimensions.

Original languageEnglish (US)
Pages (from-to)429-434
Number of pages6
JournalMaterials and Design
Volume111
DOIs
StatePublished - Dec 5 2016

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Diffraction
Ferroelectric materials
X ray diffraction
Ferroelectric thin films
Electric fields
Synchrotrons
Thin film devices
Thick films
Perovskite
MEMS
Volume fraction
Textures
lead titanate zirconate
Composite materials
Experiments

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Esteves, G., Fancher, C. M., Wallace, M., Johnson-Wilke, R., Wilke, R. H. T., Trolier-McKinstry, S. E., ... Jones, J. L. (2016). In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation. Materials and Design, 111, 429-434. https://doi.org/10.1016/j.matdes.2016.09.011
Esteves, Giovanni ; Fancher, Chris M. ; Wallace, Margeaux ; Johnson-Wilke, Raegan ; Wilke, Rudeger H.T. ; Trolier-McKinstry, Susan E. ; Polcawich, Ronald G. ; Jones, Jacob L. / In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation. In: Materials and Design. 2016 ; Vol. 111. pp. 429-434.
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abstract = "Synchrotron X-ray diffraction (XRD) was used to probe the electric-field-induced response of a 500 nm lead zirconate titanate (52/48, Zr/Ti) (PZT) based piezoelectric microelectromechanical system (piezoMEMS) device. 90° ferroelectric/ferroelastic domain reorientation was observed in a cantilever comprised of a 500 nm thick PZT film on a 3 μm thick elastic layer composite of SiO2 and Si3N4. Diffraction data from sectors both parallel- and perpendicular-to-field showed the presence of ferroelastic texture, which is typically seen in in situ electric field diffraction studies of bulk tetragonal perovskite ferroelectrics. The fraction of domains reoriented into the field direction was quantified through the intensity changes of the 002 and 200 diffraction profiles. The maximum induced volume fraction calculated from the results was 20{\%}, which is comparable to values seen in previous bulk and thin film ferroelectric diffraction studies. The novelty of the present work is that a fully released ferroelectric thin film device of micron scale dimensions (down to 60,000 μm3) was interrogated in situ with an applied electric field using synchrotron XRD. Furthermore, the experiment demonstrates that 90° ferroelectric/ferroelastic domain reorientation can be characterized in samples of such small dimensions.",
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Esteves, G, Fancher, CM, Wallace, M, Johnson-Wilke, R, Wilke, RHT, Trolier-McKinstry, SE, Polcawich, RG & Jones, JL 2016, 'In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation', Materials and Design, vol. 111, pp. 429-434. https://doi.org/10.1016/j.matdes.2016.09.011

In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation. / Esteves, Giovanni; Fancher, Chris M.; Wallace, Margeaux; Johnson-Wilke, Raegan; Wilke, Rudeger H.T.; Trolier-McKinstry, Susan E.; Polcawich, Ronald G.; Jones, Jacob L.

In: Materials and Design, Vol. 111, 05.12.2016, p. 429-434.

Research output: Contribution to journalArticle

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T1 - In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation

AU - Esteves, Giovanni

AU - Fancher, Chris M.

AU - Wallace, Margeaux

AU - Johnson-Wilke, Raegan

AU - Wilke, Rudeger H.T.

AU - Trolier-McKinstry, Susan E.

AU - Polcawich, Ronald G.

AU - Jones, Jacob L.

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N2 - Synchrotron X-ray diffraction (XRD) was used to probe the electric-field-induced response of a 500 nm lead zirconate titanate (52/48, Zr/Ti) (PZT) based piezoelectric microelectromechanical system (piezoMEMS) device. 90° ferroelectric/ferroelastic domain reorientation was observed in a cantilever comprised of a 500 nm thick PZT film on a 3 μm thick elastic layer composite of SiO2 and Si3N4. Diffraction data from sectors both parallel- and perpendicular-to-field showed the presence of ferroelastic texture, which is typically seen in in situ electric field diffraction studies of bulk tetragonal perovskite ferroelectrics. The fraction of domains reoriented into the field direction was quantified through the intensity changes of the 002 and 200 diffraction profiles. The maximum induced volume fraction calculated from the results was 20%, which is comparable to values seen in previous bulk and thin film ferroelectric diffraction studies. The novelty of the present work is that a fully released ferroelectric thin film device of micron scale dimensions (down to 60,000 μm3) was interrogated in situ with an applied electric field using synchrotron XRD. Furthermore, the experiment demonstrates that 90° ferroelectric/ferroelastic domain reorientation can be characterized in samples of such small dimensions.

AB - Synchrotron X-ray diffraction (XRD) was used to probe the electric-field-induced response of a 500 nm lead zirconate titanate (52/48, Zr/Ti) (PZT) based piezoelectric microelectromechanical system (piezoMEMS) device. 90° ferroelectric/ferroelastic domain reorientation was observed in a cantilever comprised of a 500 nm thick PZT film on a 3 μm thick elastic layer composite of SiO2 and Si3N4. Diffraction data from sectors both parallel- and perpendicular-to-field showed the presence of ferroelastic texture, which is typically seen in in situ electric field diffraction studies of bulk tetragonal perovskite ferroelectrics. The fraction of domains reoriented into the field direction was quantified through the intensity changes of the 002 and 200 diffraction profiles. The maximum induced volume fraction calculated from the results was 20%, which is comparable to values seen in previous bulk and thin film ferroelectric diffraction studies. The novelty of the present work is that a fully released ferroelectric thin film device of micron scale dimensions (down to 60,000 μm3) was interrogated in situ with an applied electric field using synchrotron XRD. Furthermore, the experiment demonstrates that 90° ferroelectric/ferroelastic domain reorientation can be characterized in samples of such small dimensions.

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