Incorporating Niobium in MoS2 at BEOL-Compatible Temperatures and its Impact on Copper Diffusion Barrier Performance

Rui Zhao, Chun Li Lo, Fu Zhang, Ram Krishna Ghosh, Theresia Knobloch, Mauricio Terrones, Zhihong Chen, Joshua Robinson

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

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Engineering & Materials Science