Influence of oxygen on surface morphology of metalorganic vapor phase epitaxy grown GaAs (001)

S. Nayak, J. W. Huang, J. M. Redwing, D. E. Savage, M. G. Lagally, T. F. Kuech

Research output: Contribution to journalArticle

9 Scopus citations

Abstract

Atomic force microscopy has been used to investigate the influence of controlled oxygen incorporation on the surface morphology of GaAs films grown by metalorganic vapor phase epitaxy (MOVPE). Oxygen influences the periodic morphology observed in GaAs surfaces, with concentrations about 1018 cm-3 leading to a breakup of the periodicity. To account for these observations, we propose a model in which oxygen preferentially attaches at steps with a subsequent reduction in step mobility and a concomitant increase in the surface roughness.

Original languageEnglish (US)
Pages (from-to)1270-1272
Number of pages3
JournalApplied Physics Letters
Volume68
Issue number9
DOIs
StatePublished - Dec 1 1996

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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