Infrared dielectric functions of hydrogenated amorphous silicon thin films determined by spectroscopic ellipsometry

David B.Saint John, Haoting Shen, Hang Beum Shin, Thomas Nelson Jackson, Nikolas J. Podraza

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Amorphous hydrogenated silicon (a-Si:H) thin films have found use in photovoltaic, transistor, and microbolometer applications. Routine optical metrology of a-Si:H is generally performed in the visible range but is not directly sensitive to hydrogen bonding. Infrared spectroscopic ellipsometry (IR-SE) allows a direct measurement of the relative absorption strength of various hydrogen-related modes, giving some insight into the hydrogen content and relative disorder of films. IR-SE is used here to develop a parameterization of ε = ε1 + iε2 for several thin (< 300 nm) hydrogenated amorphous germanium (a-Ge:H) and a-Si:H films deposited onto silicon nitride or titanium-coated crystalline silicon substrates.

Original languageEnglish (US)
Title of host publicationProgram - 38th IEEE Photovoltaic Specialists Conference, PVSC 2012
Pages3112-3117
Number of pages6
DOIs
StatePublished - Nov 26 2012
Event38th IEEE Photovoltaic Specialists Conference, PVSC 2012 - Austin, TX, United States
Duration: Jun 3 2012Jun 8 2012

Publication series

NameConference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)0160-8371

Other

Other38th IEEE Photovoltaic Specialists Conference, PVSC 2012
CountryUnited States
CityAustin, TX
Period6/3/126/8/12

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Cite this

John, D. B. S., Shen, H., Shin, H. B., Jackson, T. N., & Podraza, N. J. (2012). Infrared dielectric functions of hydrogenated amorphous silicon thin films determined by spectroscopic ellipsometry. In Program - 38th IEEE Photovoltaic Specialists Conference, PVSC 2012 (pp. 3112-3117). [6318239] (Conference Record of the IEEE Photovoltaic Specialists Conference). https://doi.org/10.1109/PVSC.2012.6318239