Initial Stages of Etching of the Si{100}(2×l) Surface by 3.0-eV Normal Incident Fluorine Atoms: A Molecular Dynamics Study

Tracy A. Schoolcraft, Barbara J. Garrison

Research output: Contribution to journalArticlepeer-review

66 Scopus citations

Fingerprint

Dive into the research topics of 'Initial Stages of Etching of the Si{100}(2×l) Surface by 3.0-eV Normal Incident Fluorine Atoms: A Molecular Dynamics Study'. Together they form a unique fingerprint.

Engineering & Materials Science

Medicine & Life Sciences

Chemical Compounds