Instrument combining x-ray photoelectron spectroscopy and secondary ion mass spectrometry for surface studies

R. W. Hewitt, A. T. Shepard, W. E. Baitinger, Nicholas Winograd, W. N. Delgass

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

X-ray Photoelectron Spectroscopy (XPS) or (ESCA) and Secondary Ion Mass Spectrometry (SIMS) have been combined in the same ultrahigh vacuum system to facilitate a new approach to studying clean and reacted surfaces. The design philosophy is to connect two satellite vacuum systems via a set of magnetically driven sample transfer devices. The advantages and capabilities of this approach are discussed with respect to its flexibility and its ability to couple to other surface techniques. XPS and static SIMS spectra of an oxidized polycrystalline indium film are presented to exemplify the type of information which can be gleaned from a multitechnique investigation of surfaces. The additional ability to prepare sample surfaces in our system by ion implantation is demonstrated by a positive-ion SIMS analysis of a gold-implanted aluminum foil.

Original languageEnglish (US)
Pages (from-to)1386-1390
Number of pages5
JournalReview of Scientific Instruments
Volume50
Issue number11
DOIs
StatePublished - Dec 1 1979

Fingerprint

Photoelectron spectroscopy
Secondary ion mass spectrometry
x ray spectroscopy
secondary ion mass spectrometry
photoelectron spectroscopy
X rays
vacuum systems
X ray photoelectron spectroscopy
Aluminum foil
Ultrahigh vacuum
positive ions
Ion implantation
Indium
ultrahigh vacuum
indium
ion implantation
foils
flexibility
x rays
Gold

All Science Journal Classification (ASJC) codes

  • Instrumentation

Cite this

Hewitt, R. W. ; Shepard, A. T. ; Baitinger, W. E. ; Winograd, Nicholas ; Delgass, W. N. / Instrument combining x-ray photoelectron spectroscopy and secondary ion mass spectrometry for surface studies. In: Review of Scientific Instruments. 1979 ; Vol. 50, No. 11. pp. 1386-1390.
@article{54b8e0d8e1ec483383058128149010cf,
title = "Instrument combining x-ray photoelectron spectroscopy and secondary ion mass spectrometry for surface studies",
abstract = "X-ray Photoelectron Spectroscopy (XPS) or (ESCA) and Secondary Ion Mass Spectrometry (SIMS) have been combined in the same ultrahigh vacuum system to facilitate a new approach to studying clean and reacted surfaces. The design philosophy is to connect two satellite vacuum systems via a set of magnetically driven sample transfer devices. The advantages and capabilities of this approach are discussed with respect to its flexibility and its ability to couple to other surface techniques. XPS and static SIMS spectra of an oxidized polycrystalline indium film are presented to exemplify the type of information which can be gleaned from a multitechnique investigation of surfaces. The additional ability to prepare sample surfaces in our system by ion implantation is demonstrated by a positive-ion SIMS analysis of a gold-implanted aluminum foil.",
author = "Hewitt, {R. W.} and Shepard, {A. T.} and Baitinger, {W. E.} and Nicholas Winograd and Delgass, {W. N.}",
year = "1979",
month = "12",
day = "1",
doi = "10.1063/1.1135719",
language = "English (US)",
volume = "50",
pages = "1386--1390",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "11",

}

Instrument combining x-ray photoelectron spectroscopy and secondary ion mass spectrometry for surface studies. / Hewitt, R. W.; Shepard, A. T.; Baitinger, W. E.; Winograd, Nicholas; Delgass, W. N.

In: Review of Scientific Instruments, Vol. 50, No. 11, 01.12.1979, p. 1386-1390.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Instrument combining x-ray photoelectron spectroscopy and secondary ion mass spectrometry for surface studies

AU - Hewitt, R. W.

AU - Shepard, A. T.

AU - Baitinger, W. E.

AU - Winograd, Nicholas

AU - Delgass, W. N.

PY - 1979/12/1

Y1 - 1979/12/1

N2 - X-ray Photoelectron Spectroscopy (XPS) or (ESCA) and Secondary Ion Mass Spectrometry (SIMS) have been combined in the same ultrahigh vacuum system to facilitate a new approach to studying clean and reacted surfaces. The design philosophy is to connect two satellite vacuum systems via a set of magnetically driven sample transfer devices. The advantages and capabilities of this approach are discussed with respect to its flexibility and its ability to couple to other surface techniques. XPS and static SIMS spectra of an oxidized polycrystalline indium film are presented to exemplify the type of information which can be gleaned from a multitechnique investigation of surfaces. The additional ability to prepare sample surfaces in our system by ion implantation is demonstrated by a positive-ion SIMS analysis of a gold-implanted aluminum foil.

AB - X-ray Photoelectron Spectroscopy (XPS) or (ESCA) and Secondary Ion Mass Spectrometry (SIMS) have been combined in the same ultrahigh vacuum system to facilitate a new approach to studying clean and reacted surfaces. The design philosophy is to connect two satellite vacuum systems via a set of magnetically driven sample transfer devices. The advantages and capabilities of this approach are discussed with respect to its flexibility and its ability to couple to other surface techniques. XPS and static SIMS spectra of an oxidized polycrystalline indium film are presented to exemplify the type of information which can be gleaned from a multitechnique investigation of surfaces. The additional ability to prepare sample surfaces in our system by ion implantation is demonstrated by a positive-ion SIMS analysis of a gold-implanted aluminum foil.

UR - http://www.scopus.com/inward/record.url?scp=36749118701&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=36749118701&partnerID=8YFLogxK

U2 - 10.1063/1.1135719

DO - 10.1063/1.1135719

M3 - Article

AN - SCOPUS:36749118701

VL - 50

SP - 1386

EP - 1390

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 11

ER -