Integrated electronics for control of large-area piezoelectric arrays for adjustable optics

M. L. Wallace, J. I. Ramirez, R. Allured, Z. Prieskorn, V. Marquez, David Nelson Burrows, P. Reid, Thomas Nelson Jackson, Susan E. Trolier-McKinstry

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Direct integration of electronics on piezoelectrics is attractive for large array transducers and adjustable optics systems; it allows for the possibility of reconfigurability as well as active surfaces with a greatly reduced number of electrical connections. In this work, lead zirconate titanate (PZT) piezoelectric films were co-processed with ZnO thin film transistors to explore the possibility of direct integration. The sputter deposited PZT on glass had good electrical properties on large area (cm2) electrodes, with a dielectric constant of >1200 with a loss of approximately 2% and an average remanent polarization of greater than >23 μC/cm2. Fabrication of arrays of thin film transistors (TFTs) processed directly on top of PZT pixels for use in an adaptive optics system was demonstrated. Photoreactive benzocyclobutene (BCB) electrically isolated the ZnO TFTs, deposited using plasma enhanced atomic layer deposition, from the electrodes on the piezoelectric cell. Flex cables were bonded to the wafer using anisotropic conductive film (ACF) to connect the gates (row control) and the drains (column control) in the TFT array to a control box. It was found that when actuating the PZT cells through the TFT array with 5–10 V, the glass mirror experienced approximately 700–1000 nm of deflection, adequate for figure control in future X-ray mirrors.

Original languageEnglish (US)
Pages (from-to)304-311
Number of pages8
JournalSensors and Actuators, A: Physical
Volume276
DOIs
StatePublished - Jun 15 2018

Fingerprint

Thin film transistors
Optics
Electronic equipment
transistors
optics
thin films
electronics
mirrors
Glass
Electrodes
Conductive films
electrodes
Adaptive optics
Atomic layer deposition
Remanence
glass
atomic layer epitaxy
cells
adaptive optics
cables

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

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title = "Integrated electronics for control of large-area piezoelectric arrays for adjustable optics",
abstract = "Direct integration of electronics on piezoelectrics is attractive for large array transducers and adjustable optics systems; it allows for the possibility of reconfigurability as well as active surfaces with a greatly reduced number of electrical connections. In this work, lead zirconate titanate (PZT) piezoelectric films were co-processed with ZnO thin film transistors to explore the possibility of direct integration. The sputter deposited PZT on glass had good electrical properties on large area (cm2) electrodes, with a dielectric constant of >1200 with a loss of approximately 2{\%} and an average remanent polarization of greater than >23 μC/cm2. Fabrication of arrays of thin film transistors (TFTs) processed directly on top of PZT pixels for use in an adaptive optics system was demonstrated. Photoreactive benzocyclobutene (BCB) electrically isolated the ZnO TFTs, deposited using plasma enhanced atomic layer deposition, from the electrodes on the piezoelectric cell. Flex cables were bonded to the wafer using anisotropic conductive film (ACF) to connect the gates (row control) and the drains (column control) in the TFT array to a control box. It was found that when actuating the PZT cells through the TFT array with 5–10 V, the glass mirror experienced approximately 700–1000 nm of deflection, adequate for figure control in future X-ray mirrors.",
author = "Wallace, {M. L.} and Ramirez, {J. I.} and R. Allured and Z. Prieskorn and V. Marquez and Burrows, {David Nelson} and P. Reid and Jackson, {Thomas Nelson} and Trolier-McKinstry, {Susan E.}",
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Integrated electronics for control of large-area piezoelectric arrays for adjustable optics. / Wallace, M. L.; Ramirez, J. I.; Allured, R.; Prieskorn, Z.; Marquez, V.; Burrows, David Nelson; Reid, P.; Jackson, Thomas Nelson; Trolier-McKinstry, Susan E.

In: Sensors and Actuators, A: Physical, Vol. 276, 15.06.2018, p. 304-311.

Research output: Contribution to journalArticle

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AU - Wallace, M. L.

AU - Ramirez, J. I.

AU - Allured, R.

AU - Prieskorn, Z.

AU - Marquez, V.

AU - Burrows, David Nelson

AU - Reid, P.

AU - Jackson, Thomas Nelson

AU - Trolier-McKinstry, Susan E.

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