Integration concepts for the fabrication of LTCC structures

Amanda Baker, Michael T. Lanagan, Clive A. Randall, Elena Seniouchkina, George Semouchkin, Klialid Z. Rajab, Raj Mittra, Richard Eitel, Sorah Rliee, Peter Geggier, Guenter Fulir

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

At the Keck Smart Materials Integration Laboratory at Perm State University, Low Temperature Co-fired Ceramic (LTCC) materials systems have been used to fabricate a number of devices for a variety of applications. This paper is an overview of the integration of concepts and materials that we have employed to achieve miniaturization and unique device function. Examples of microwave filters, metamaterials, and a cell sorter will be presented, with emphasis on device modeling and design, prototype construction methods, and test results.

Original languageEnglish (US)
Title of host publicationProceedings - 2005 IMAPS/ACerS 1st International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2005
Pages46-52
Number of pages7
StatePublished - Dec 1 2005
Event1st International Conference and Exhibition on Ceramic Microsystems Technologies, CICMT 2005 - Co-located with the 107th Annual Meeting of the American Ceramic Society, ACerS 2005 - Baltimore, MD, United States
Duration: Apr 10 2005Apr 13 2005

Publication series

NameProceedings - 2005 IMAPS/ACerS 1st International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2005

Other

Other1st International Conference and Exhibition on Ceramic Microsystems Technologies, CICMT 2005 - Co-located with the 107th Annual Meeting of the American Ceramic Society, ACerS 2005
CountryUnited States
CityBaltimore, MD
Period4/10/054/13/05

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Materials Chemistry

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    Baker, A., Lanagan, M. T., Randall, C. A., Seniouchkina, E., Semouchkin, G., Rajab, K. Z., Mittra, R., Eitel, R., Rliee, S., Geggier, P., & Fulir, G. (2005). Integration concepts for the fabrication of LTCC structures. In Proceedings - 2005 IMAPS/ACerS 1st International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2005 (pp. 46-52). (Proceedings - 2005 IMAPS/ACerS 1st International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2005).