Interdigital capacitive array of tree-like carbon nanotubes on silicon-based membranes for sensor applications

A. Ebrahimi, Y. Abdi, S. Mohajerzadeh, S. Paydavosi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have grown tree-like vertically-aligned carbon nanotubes (CNTs) on silicon substrate, suitable for highly sensitive interdigital capacitive sensors. As an application, we present a sensitive pressure sensor with branched CNTs as its capacitance plates. After realization of the interdigital structure, the growth of CNTs has been achieved through direct-current plasma enhanced chemical vapor deposition (DC-PECVD) method. A sequential growth and hydrogenation has led to the formation of multiple branched structures of nanotubes. The growth of tree-like CNTs on the interdigitally patterned substrate results in a high overlap between adjacent fingers and consequently a significant response to mechanical variations of the membrane as a result of the applied pressure.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings - Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography
PublisherMaterials Research Society
Pages82-87
Number of pages6
ISBN (Print)9781615673889
DOIs
StatePublished - Jan 1 2009
EventMaterial Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography - San Francicso, CA, United States
Duration: Apr 13 2009Apr 17 2009

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1179
ISSN (Print)0272-9172

Other

OtherMaterial Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography
CountryUnited States
CitySan Francicso, CA
Period4/13/094/17/09

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Ebrahimi, A., Abdi, Y., Mohajerzadeh, S., & Paydavosi, S. (2009). Interdigital capacitive array of tree-like carbon nanotubes on silicon-based membranes for sensor applications. In Materials Research Society Symposium Proceedings - Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography (pp. 82-87). (Materials Research Society Symposium Proceedings; Vol. 1179). Materials Research Society. https://doi.org/10.1557/proc-1179-bb06-07