Interdigital capacitive array of tree-like carbon nanotubes on silicon-based membranes for sensor applications

Seyedehaida Ebrahimi, Y. Abdi, S. Mohajerzadeh, S. Paydavosi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have grown tree-like vertically-aligned carbon nanotubes (CNTs) on silicon substrate, suitable for highly sensitive interdigital capacitive sensors. As an application, we present a sensitive pressure sensor with branched CNTs as its capacitance plates. After realization of the interdigital structure, the growth of CNTs has been achieved through direct-current plasma enhanced chemical vapor deposition (DC-PECVD) method. A sequential growth and hydrogenation has led to the formation of multiple branched structures of nanotubes. The growth of tree-like CNTs on the interdigitally patterned substrate results in a high overlap between adjacent fingers and consequently a significant response to mechanical variations of the membrane as a result of the applied pressure.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings - Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography
Pages82-87
Number of pages6
StatePublished - Nov 26 2009
EventMaterial Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography - San Francicso, CA, United States
Duration: Apr 13 2009Apr 17 2009

Publication series

NameMaterials Research Society Symposium Proceedings
Volume1179
ISSN (Print)0272-9172

Other

OtherMaterial Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography
CountryUnited States
CitySan Francicso, CA
Period4/13/094/17/09

Fingerprint

Carbon Nanotubes
Silicon
Carbon nanotubes
carbon nanotubes
membranes
Membranes
sensors
Sensors
silicon
Capacitive sensors
Pressure sensors
Substrates
pressure sensors
Plasma enhanced chemical vapor deposition
Nanotubes
Hydrogenation
hydrogenation
nanotubes
Capacitance
capacitance

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Ebrahimi, S., Abdi, Y., Mohajerzadeh, S., & Paydavosi, S. (2009). Interdigital capacitive array of tree-like carbon nanotubes on silicon-based membranes for sensor applications. In Materials Research Society Symposium Proceedings - Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography (pp. 82-87). (Materials Research Society Symposium Proceedings; Vol. 1179).
Ebrahimi, Seyedehaida ; Abdi, Y. ; Mohajerzadeh, S. ; Paydavosi, S. / Interdigital capacitive array of tree-like carbon nanotubes on silicon-based membranes for sensor applications. Materials Research Society Symposium Proceedings - Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography. 2009. pp. 82-87 (Materials Research Society Symposium Proceedings).
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abstract = "We have grown tree-like vertically-aligned carbon nanotubes (CNTs) on silicon substrate, suitable for highly sensitive interdigital capacitive sensors. As an application, we present a sensitive pressure sensor with branched CNTs as its capacitance plates. After realization of the interdigital structure, the growth of CNTs has been achieved through direct-current plasma enhanced chemical vapor deposition (DC-PECVD) method. A sequential growth and hydrogenation has led to the formation of multiple branched structures of nanotubes. The growth of tree-like CNTs on the interdigitally patterned substrate results in a high overlap between adjacent fingers and consequently a significant response to mechanical variations of the membrane as a result of the applied pressure.",
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Ebrahimi, S, Abdi, Y, Mohajerzadeh, S & Paydavosi, S 2009, Interdigital capacitive array of tree-like carbon nanotubes on silicon-based membranes for sensor applications. in Materials Research Society Symposium Proceedings - Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography. Materials Research Society Symposium Proceedings, vol. 1179, pp. 82-87, Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography, San Francicso, CA, United States, 4/13/09.

Interdigital capacitive array of tree-like carbon nanotubes on silicon-based membranes for sensor applications. / Ebrahimi, Seyedehaida; Abdi, Y.; Mohajerzadeh, S.; Paydavosi, S.

Materials Research Society Symposium Proceedings - Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography. 2009. p. 82-87 (Materials Research Society Symposium Proceedings; Vol. 1179).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Ebrahimi S, Abdi Y, Mohajerzadeh S, Paydavosi S. Interdigital capacitive array of tree-like carbon nanotubes on silicon-based membranes for sensor applications. In Materials Research Society Symposium Proceedings - Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography. 2009. p. 82-87. (Materials Research Society Symposium Proceedings).