Introduction to the special issue on high-k dielectric reliability

John F. Conley, Gennadi Bersuker, Patrick M. Lenahan

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Pages (from-to)	3-4
Number of pages	2
Journal	IEEE Transactions on Device and Materials Reliability
Volume	5
Issue number	1
DOIs	https://doi.org/10.1109/TDMR.2005.847999
State	Published - Mar 1 2005

All Science Journal Classification (ASJC) codes

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title = "Introduction to the special issue on high-k dielectric reliability",

author = "Conley, {John F.} and Gennadi Bersuker and Lenahan, {Patrick M.}",

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AU - Lenahan, Patrick M.

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