Abstract
With the increasing use of instruments that require micro- and nano-level precision, the consideration of stringent vibration criteria in the design of the facilities that contain these instruments has also increased. This paper presents a case study of the performance of a slab on grade constructed in a high performance research facility that houses various pieces of sensitive equipment such as an electron beam lithography system, scanning electron microscopes and transmission electron microscopes. The investigation explores the dynamic properties of a slab-on-grade specifically designed and constructed to support the sensitive equipment. Analytical techniques to predict the dynamic behavior are discussed and compared to actual performance with respect the generic design criterion and the equipment manufacturer-specified design criteria.
| Original language | English (US) |
|---|---|
| Title of host publication | Mechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics |
| Publisher | Springer New York LLC |
| Pages | 53-60 |
| Number of pages | 8 |
| Volume | 4 |
| ISBN (Print) | 9783319007762 |
| DOIs | |
| State | Published - 2014 |
| Event | 32nd IMAC Conference and Exposition on Structural Dynamics, 2014 - Orlando, FL, United States Duration: Feb 3 2014 → Feb 6 2014 |
Other
| Other | 32nd IMAC Conference and Exposition on Structural Dynamics, 2014 |
|---|---|
| Country | United States |
| City | Orlando, FL |
| Period | 2/3/14 → 2/6/14 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
- Computational Mechanics
- Mechanical Engineering
Cite this
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Investigation of a slab on grade supporting sensitive equipment. / Barben, B. R.; Hanagan, Linda Morley.
Mechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics. Vol. 4 Springer New York LLC, 2014. p. 53-60.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Investigation of a slab on grade supporting sensitive equipment
AU - Barben, B. R.
AU - Hanagan, Linda Morley
PY - 2014
Y1 - 2014
N2 - With the increasing use of instruments that require micro- and nano-level precision, the consideration of stringent vibration criteria in the design of the facilities that contain these instruments has also increased. This paper presents a case study of the performance of a slab on grade constructed in a high performance research facility that houses various pieces of sensitive equipment such as an electron beam lithography system, scanning electron microscopes and transmission electron microscopes. The investigation explores the dynamic properties of a slab-on-grade specifically designed and constructed to support the sensitive equipment. Analytical techniques to predict the dynamic behavior are discussed and compared to actual performance with respect the generic design criterion and the equipment manufacturer-specified design criteria.
AB - With the increasing use of instruments that require micro- and nano-level precision, the consideration of stringent vibration criteria in the design of the facilities that contain these instruments has also increased. This paper presents a case study of the performance of a slab on grade constructed in a high performance research facility that houses various pieces of sensitive equipment such as an electron beam lithography system, scanning electron microscopes and transmission electron microscopes. The investigation explores the dynamic properties of a slab-on-grade specifically designed and constructed to support the sensitive equipment. Analytical techniques to predict the dynamic behavior are discussed and compared to actual performance with respect the generic design criterion and the equipment manufacturer-specified design criteria.
UR - http://www.scopus.com/inward/record.url?scp=84988683841&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84988683841&partnerID=8YFLogxK
U2 - 10.1007/978-3-319-04546-7_7
DO - 10.1007/978-3-319-04546-7_7
M3 - Conference contribution
SN - 9783319007762
VL - 4
SP - 53
EP - 60
BT - Mechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics
PB - Springer New York LLC
ER -