@inproceedings{20d7999bb81949278379fa383dd40196,
title = "Investigation of a slab on grade supporting sensitive equipment",
abstract = "With the increasing use of instruments that require micro- and nano-level precision, the consideration of stringent vibration criteria in the design of the facilities that contain these instruments has also increased. This paper presents a case study of the performance of a slab on grade constructed in a high performance research facility that houses various pieces of sensitive equipment such as an electron beam lithography system, scanning electron microscopes and transmission electron microscopes. The investigation explores the dynamic properties of a slab-on-grade specifically designed and constructed to support the sensitive equipment. Analytical techniques to predict the dynamic behavior are discussed and compared to actual performance with respect the generic design criterion and the equipment manufacturer-specified design criteria.",
author = "Barben, {B. R.} and Hanagan, {L. M.}",
year = "2014",
month = jan,
day = "1",
doi = "10.1007/978-3-319-04546-7_7",
language = "English (US)",
isbn = "9783319007762",
series = "Conference Proceedings of the Society for Experimental Mechanics Series",
publisher = "Springer New York LLC",
pages = "53--60",
booktitle = "Mechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics",
note = "32nd IMAC Conference and Exposition on Structural Dynamics, 2014 ; Conference date: 03-02-2014 Through 06-02-2014",
}