Investigation of a slab on grade supporting sensitive equipment

B. R. Barben, Linda Morley Hanagan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

With the increasing use of instruments that require micro- and nano-level precision, the consideration of stringent vibration criteria in the design of the facilities that contain these instruments has also increased. This paper presents a case study of the performance of a slab on grade constructed in a high performance research facility that houses various pieces of sensitive equipment such as an electron beam lithography system, scanning electron microscopes and transmission electron microscopes. The investigation explores the dynamic properties of a slab-on-grade specifically designed and constructed to support the sensitive equipment. Analytical techniques to predict the dynamic behavior are discussed and compared to actual performance with respect the generic design criterion and the equipment manufacturer-specified design criteria.

Original languageEnglish (US)
Title of host publicationMechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics
PublisherSpringer New York LLC
Pages53-60
Number of pages8
Volume4
ISBN (Print)9783319007762
DOIs
StatePublished - 2014
Event32nd IMAC Conference and Exposition on Structural Dynamics, 2014 - Orlando, FL, United States
Duration: Feb 3 2014Feb 6 2014

Other

Other32nd IMAC Conference and Exposition on Structural Dynamics, 2014
CountryUnited States
CityOrlando, FL
Period2/3/142/6/14

Fingerprint

Electron microscopes
Electron beam lithography
Scanning

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Computational Mechanics
  • Mechanical Engineering

Cite this

Barben, B. R., & Hanagan, L. M. (2014). Investigation of a slab on grade supporting sensitive equipment. In Mechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics (Vol. 4, pp. 53-60). Springer New York LLC. https://doi.org/10.1007/978-3-319-04546-7_7
Barben, B. R. ; Hanagan, Linda Morley. / Investigation of a slab on grade supporting sensitive equipment. Mechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics. Vol. 4 Springer New York LLC, 2014. pp. 53-60
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Barben, BR & Hanagan, LM 2014, Investigation of a slab on grade supporting sensitive equipment. in Mechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics. vol. 4, Springer New York LLC, pp. 53-60, 32nd IMAC Conference and Exposition on Structural Dynamics, 2014, Orlando, FL, United States, 2/3/14. https://doi.org/10.1007/978-3-319-04546-7_7

Investigation of a slab on grade supporting sensitive equipment. / Barben, B. R.; Hanagan, Linda Morley.

Mechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics. Vol. 4 Springer New York LLC, 2014. p. 53-60.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - With the increasing use of instruments that require micro- and nano-level precision, the consideration of stringent vibration criteria in the design of the facilities that contain these instruments has also increased. This paper presents a case study of the performance of a slab on grade constructed in a high performance research facility that houses various pieces of sensitive equipment such as an electron beam lithography system, scanning electron microscopes and transmission electron microscopes. The investigation explores the dynamic properties of a slab-on-grade specifically designed and constructed to support the sensitive equipment. Analytical techniques to predict the dynamic behavior are discussed and compared to actual performance with respect the generic design criterion and the equipment manufacturer-specified design criteria.

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Barben BR, Hanagan LM. Investigation of a slab on grade supporting sensitive equipment. In Mechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics. Vol. 4. Springer New York LLC. 2014. p. 53-60 https://doi.org/10.1007/978-3-319-04546-7_7