Investigation of a slab on grade supporting sensitive equipment

B. R. Barben, L. M. Hanagan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

With the increasing use of instruments that require micro- and nano-level precision, the consideration of stringent vibration criteria in the design of the facilities that contain these instruments has also increased. This paper presents a case study of the performance of a slab on grade constructed in a high performance research facility that houses various pieces of sensitive equipment such as an electron beam lithography system, scanning electron microscopes and transmission electron microscopes. The investigation explores the dynamic properties of a slab-on-grade specifically designed and constructed to support the sensitive equipment. Analytical techniques to predict the dynamic behavior are discussed and compared to actual performance with respect the generic design criterion and the equipment manufacturer-specified design criteria.

Original languageEnglish (US)
Title of host publicationMechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics
PublisherSpringer New York LLC
Pages53-60
Number of pages8
ISBN (Print)9783319007762
DOIs
StatePublished - Jan 1 2014
Event32nd IMAC Conference and Exposition on Structural Dynamics, 2014 - Orlando, FL, United States
Duration: Feb 3 2014Feb 6 2014

Publication series

NameConference Proceedings of the Society for Experimental Mechanics Series
Volume4
ISSN (Print)2191-5644
ISSN (Electronic)2191-5652

Other

Other32nd IMAC Conference and Exposition on Structural Dynamics, 2014
CountryUnited States
CityOrlando, FL
Period2/3/142/6/14

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Computational Mechanics
  • Mechanical Engineering

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  • Cite this

    Barben, B. R., & Hanagan, L. M. (2014). Investigation of a slab on grade supporting sensitive equipment. In Mechanics of Biological Systems and Materials - Proceedings of the 2013 Annual Conference on Experimental and Applied Mechanics (pp. 53-60). (Conference Proceedings of the Society for Experimental Mechanics Series; Vol. 4). Springer New York LLC. https://doi.org/10.1007/978-3-319-04546-7_7