Investigation of Ca3TaGa3Si2O14 piezoelectric crystals for high temperature sensors

Fapeng Yu, Shujun Zhang, Xian Zhao, Duorong Yuan, Lifeng Qin, Qing Ming Wang, Thomas R. Shrout

Research output: Contribution to journalArticle

46 Citations (Scopus)

Abstract

The dielectric and electromechanical properties of fully ordered Ca 3TaGa3Si2O14 (CTGS) crystals were investigated over the temperature range of -60∼700 C. The highest electromechanical coupling factor, k26 (18.9%) and piezoelectric coefficient, d26 (-11.5 pC/N) were obtained for (YXl)-25° cuts. The temperature dependent behavior of resonance frequency (fr) was investigated in single-rotated thickness shear mode (TSM) (YXl)θ cuts (θ-35°∼10°). The turnover temperatures of resonance frequency were found to increase from 20°C to 330°C, as the rotation angle varied from -22.5° to -35°. Bulk acoustic wave (BAW) resonators based on Y(-30) monolithic disks with a fundamental frequency ∼2.87 MHz were fabricated, where the in air mechanical quality factor Q was found to be on the order of 24000 and 10000 at 20°C and 700°C, respectively. The high coupling k26, high mechanical Q, and high electrical resistivity (16 Mcm) at 700°C, together with the near zero TCF characteristics at elevated temperatures, demonstrate the potential of CTGS crystals for high temperature sensor applications.

Original languageEnglish (US)
Article number114103
JournalJournal of Applied Physics
Volume109
Issue number11
DOIs
StatePublished - Jun 1 2011

Fingerprint

piezoelectric crystals
temperature sensors
temperature
crystals
dielectric properties
Q factors
resonators
shear
electrical resistivity
acoustics
air
coefficients

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Yu, F., Zhang, S., Zhao, X., Yuan, D., Qin, L., Wang, Q. M., & Shrout, T. R. (2011). Investigation of Ca3TaGa3Si2O14 piezoelectric crystals for high temperature sensors. Journal of Applied Physics, 109(11), [114103]. https://doi.org/10.1063/1.3592347
Yu, Fapeng ; Zhang, Shujun ; Zhao, Xian ; Yuan, Duorong ; Qin, Lifeng ; Wang, Qing Ming ; Shrout, Thomas R. / Investigation of Ca3TaGa3Si2O14 piezoelectric crystals for high temperature sensors. In: Journal of Applied Physics. 2011 ; Vol. 109, No. 11.
@article{1599ccdb84c24902bcf4e502ca407156,
title = "Investigation of Ca3TaGa3Si2O14 piezoelectric crystals for high temperature sensors",
abstract = "The dielectric and electromechanical properties of fully ordered Ca 3TaGa3Si2O14 (CTGS) crystals were investigated over the temperature range of -60∼700 C. The highest electromechanical coupling factor, k26 (18.9{\%}) and piezoelectric coefficient, d26 (-11.5 pC/N) were obtained for (YXl)-25° cuts. The temperature dependent behavior of resonance frequency (fr) was investigated in single-rotated thickness shear mode (TSM) (YXl)θ cuts (θ-35°∼10°). The turnover temperatures of resonance frequency were found to increase from 20°C to 330°C, as the rotation angle varied from -22.5° to -35°. Bulk acoustic wave (BAW) resonators based on Y(-30) monolithic disks with a fundamental frequency ∼2.87 MHz were fabricated, where the in air mechanical quality factor Q was found to be on the order of 24000 and 10000 at 20°C and 700°C, respectively. The high coupling k26, high mechanical Q, and high electrical resistivity (16 Mcm) at 700°C, together with the near zero TCF characteristics at elevated temperatures, demonstrate the potential of CTGS crystals for high temperature sensor applications.",
author = "Fapeng Yu and Shujun Zhang and Xian Zhao and Duorong Yuan and Lifeng Qin and Wang, {Qing Ming} and Shrout, {Thomas R.}",
year = "2011",
month = "6",
day = "1",
doi = "10.1063/1.3592347",
language = "English (US)",
volume = "109",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "11",

}

Yu, F, Zhang, S, Zhao, X, Yuan, D, Qin, L, Wang, QM & Shrout, TR 2011, 'Investigation of Ca3TaGa3Si2O14 piezoelectric crystals for high temperature sensors', Journal of Applied Physics, vol. 109, no. 11, 114103. https://doi.org/10.1063/1.3592347

Investigation of Ca3TaGa3Si2O14 piezoelectric crystals for high temperature sensors. / Yu, Fapeng; Zhang, Shujun; Zhao, Xian; Yuan, Duorong; Qin, Lifeng; Wang, Qing Ming; Shrout, Thomas R.

In: Journal of Applied Physics, Vol. 109, No. 11, 114103, 01.06.2011.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Investigation of Ca3TaGa3Si2O14 piezoelectric crystals for high temperature sensors

AU - Yu, Fapeng

AU - Zhang, Shujun

AU - Zhao, Xian

AU - Yuan, Duorong

AU - Qin, Lifeng

AU - Wang, Qing Ming

AU - Shrout, Thomas R.

PY - 2011/6/1

Y1 - 2011/6/1

N2 - The dielectric and electromechanical properties of fully ordered Ca 3TaGa3Si2O14 (CTGS) crystals were investigated over the temperature range of -60∼700 C. The highest electromechanical coupling factor, k26 (18.9%) and piezoelectric coefficient, d26 (-11.5 pC/N) were obtained for (YXl)-25° cuts. The temperature dependent behavior of resonance frequency (fr) was investigated in single-rotated thickness shear mode (TSM) (YXl)θ cuts (θ-35°∼10°). The turnover temperatures of resonance frequency were found to increase from 20°C to 330°C, as the rotation angle varied from -22.5° to -35°. Bulk acoustic wave (BAW) resonators based on Y(-30) monolithic disks with a fundamental frequency ∼2.87 MHz were fabricated, where the in air mechanical quality factor Q was found to be on the order of 24000 and 10000 at 20°C and 700°C, respectively. The high coupling k26, high mechanical Q, and high electrical resistivity (16 Mcm) at 700°C, together with the near zero TCF characteristics at elevated temperatures, demonstrate the potential of CTGS crystals for high temperature sensor applications.

AB - The dielectric and electromechanical properties of fully ordered Ca 3TaGa3Si2O14 (CTGS) crystals were investigated over the temperature range of -60∼700 C. The highest electromechanical coupling factor, k26 (18.9%) and piezoelectric coefficient, d26 (-11.5 pC/N) were obtained for (YXl)-25° cuts. The temperature dependent behavior of resonance frequency (fr) was investigated in single-rotated thickness shear mode (TSM) (YXl)θ cuts (θ-35°∼10°). The turnover temperatures of resonance frequency were found to increase from 20°C to 330°C, as the rotation angle varied from -22.5° to -35°. Bulk acoustic wave (BAW) resonators based on Y(-30) monolithic disks with a fundamental frequency ∼2.87 MHz were fabricated, where the in air mechanical quality factor Q was found to be on the order of 24000 and 10000 at 20°C and 700°C, respectively. The high coupling k26, high mechanical Q, and high electrical resistivity (16 Mcm) at 700°C, together with the near zero TCF characteristics at elevated temperatures, demonstrate the potential of CTGS crystals for high temperature sensor applications.

UR - http://www.scopus.com/inward/record.url?scp=79959468727&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79959468727&partnerID=8YFLogxK

U2 - 10.1063/1.3592347

DO - 10.1063/1.3592347

M3 - Article

VL - 109

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 11

M1 - 114103

ER -