Investigation of Ca3TaGa3Si2O14 piezoelectric crystals for high temperature sensors

Fapeng Yu, Shujun Zhang, Xian Zhao, Duorong Yuan, Lifeng Qin, Qing Ming Wang, Thomas R. Shrout

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Abstract

The dielectric and electromechanical properties of fully ordered Ca 3TaGa3Si2O14 (CTGS) crystals were investigated over the temperature range of -60∼700 C. The highest electromechanical coupling factor, k26 (18.9%) and piezoelectric coefficient, d26 (-11.5 pC/N) were obtained for (YXl)-25° cuts. The temperature dependent behavior of resonance frequency (fr) was investigated in single-rotated thickness shear mode (TSM) (YXl)θ cuts (θ-35°∼10°). The turnover temperatures of resonance frequency were found to increase from 20°C to 330°C, as the rotation angle varied from -22.5° to -35°. Bulk acoustic wave (BAW) resonators based on Y(-30) monolithic disks with a fundamental frequency ∼2.87 MHz were fabricated, where the in air mechanical quality factor Q was found to be on the order of 24000 and 10000 at 20°C and 700°C, respectively. The high coupling k26, high mechanical Q, and high electrical resistivity (16 Mcm) at 700°C, together with the near zero TCF characteristics at elevated temperatures, demonstrate the potential of CTGS crystals for high temperature sensor applications.

Original languageEnglish (US)
Article number114103
JournalJournal of Applied Physics
Volume109
Issue number11
DOIs
StatePublished - Jun 1 2011

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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    Yu, F., Zhang, S., Zhao, X., Yuan, D., Qin, L., Wang, Q. M., & Shrout, T. R. (2011). Investigation of Ca3TaGa3Si2O14 piezoelectric crystals for high temperature sensors. Journal of Applied Physics, 109(11), [114103]. https://doi.org/10.1063/1.3592347