Investigation of polymer micro-actuators based on electrostrictive poly(vinylidene fluoride-trifluoroethylene) copolymers

Tian Bing Xu, Feng Xia, Z. Y. Cheng, Qiming Zhang

    Research output: Contribution to journalConference article

    Abstract

    Micromachined actuators based on the electrostrictive P(VDF-TrFE) copolymer, which possesses a high strain (∼5%) and high elastic energy density (∼ 1 J/cm3), have been designed and fabricated. The performance of the devices have been characterized and modeled in terms of the properties of the copolymer and dimensions of the devices. The experimental results of the device responses under high AC fields (electrostrictive mode), weak AC fields in DC field biased state, and frequency dependence, are very close to the modeling results. Due to the large field induced strain and high frequency capability of the electrostrictive P(VDF-TrFE), the device possesses the capability of operation at non-resonance mode with high displacement and force output, and hence, the device is capable to be used over a broad frequency range. For example, for a device of 1 mm lateral dimension, the displacement output can reach more than 50 μm and the ratio of the displacement/applied voltage is more than 20 nm/Vrms. Furthermore, over more than 3 frequency decades (up to 100 kHz), the dispersion of the displacement is less than 20%. The observed performance of the devices indicates that this class of the electrostrictive P(VDF-TrFE) based micro-actuators is attractive for micropumps and valves.

    Original languageEnglish (US)
    Pages (from-to)99-104
    Number of pages6
    JournalMaterials Research Society Symposium - Proceedings
    Volume741
    StatePublished - Dec 1 2002
    EventNano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines - Boston, MA, United States
    Duration: Dec 2 2002Dec 4 2002

    Fingerprint

    vinylidene
    fluorides
    copolymers
    Polymers
    Actuators
    Copolymers
    actuators
    polymers
    Electric potential
    alternating current
    nonresonance
    output
    vinylidene fluoride-trifluoroethylene copolymer
    polyvinylidene fluoride
    flux density
    frequency ranges
    direct current
    electric potential

    All Science Journal Classification (ASJC) codes

    • Materials Science(all)
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

    Cite this

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    title = "Investigation of polymer micro-actuators based on electrostrictive poly(vinylidene fluoride-trifluoroethylene) copolymers",
    abstract = "Micromachined actuators based on the electrostrictive P(VDF-TrFE) copolymer, which possesses a high strain (∼5{\%}) and high elastic energy density (∼ 1 J/cm3), have been designed and fabricated. The performance of the devices have been characterized and modeled in terms of the properties of the copolymer and dimensions of the devices. The experimental results of the device responses under high AC fields (electrostrictive mode), weak AC fields in DC field biased state, and frequency dependence, are very close to the modeling results. Due to the large field induced strain and high frequency capability of the electrostrictive P(VDF-TrFE), the device possesses the capability of operation at non-resonance mode with high displacement and force output, and hence, the device is capable to be used over a broad frequency range. For example, for a device of 1 mm lateral dimension, the displacement output can reach more than 50 μm and the ratio of the displacement/applied voltage is more than 20 nm/Vrms. Furthermore, over more than 3 frequency decades (up to 100 kHz), the dispersion of the displacement is less than 20{\%}. The observed performance of the devices indicates that this class of the electrostrictive P(VDF-TrFE) based micro-actuators is attractive for micropumps and valves.",
    author = "Xu, {Tian Bing} and Feng Xia and Cheng, {Z. Y.} and Qiming Zhang",
    year = "2002",
    month = "12",
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    language = "English (US)",
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    Investigation of polymer micro-actuators based on electrostrictive poly(vinylidene fluoride-trifluoroethylene) copolymers. / Xu, Tian Bing; Xia, Feng; Cheng, Z. Y.; Zhang, Qiming.

    In: Materials Research Society Symposium - Proceedings, Vol. 741, 01.12.2002, p. 99-104.

    Research output: Contribution to journalConference article

    TY - JOUR

    T1 - Investigation of polymer micro-actuators based on electrostrictive poly(vinylidene fluoride-trifluoroethylene) copolymers

    AU - Xu, Tian Bing

    AU - Xia, Feng

    AU - Cheng, Z. Y.

    AU - Zhang, Qiming

    PY - 2002/12/1

    Y1 - 2002/12/1

    N2 - Micromachined actuators based on the electrostrictive P(VDF-TrFE) copolymer, which possesses a high strain (∼5%) and high elastic energy density (∼ 1 J/cm3), have been designed and fabricated. The performance of the devices have been characterized and modeled in terms of the properties of the copolymer and dimensions of the devices. The experimental results of the device responses under high AC fields (electrostrictive mode), weak AC fields in DC field biased state, and frequency dependence, are very close to the modeling results. Due to the large field induced strain and high frequency capability of the electrostrictive P(VDF-TrFE), the device possesses the capability of operation at non-resonance mode with high displacement and force output, and hence, the device is capable to be used over a broad frequency range. For example, for a device of 1 mm lateral dimension, the displacement output can reach more than 50 μm and the ratio of the displacement/applied voltage is more than 20 nm/Vrms. Furthermore, over more than 3 frequency decades (up to 100 kHz), the dispersion of the displacement is less than 20%. The observed performance of the devices indicates that this class of the electrostrictive P(VDF-TrFE) based micro-actuators is attractive for micropumps and valves.

    AB - Micromachined actuators based on the electrostrictive P(VDF-TrFE) copolymer, which possesses a high strain (∼5%) and high elastic energy density (∼ 1 J/cm3), have been designed and fabricated. The performance of the devices have been characterized and modeled in terms of the properties of the copolymer and dimensions of the devices. The experimental results of the device responses under high AC fields (electrostrictive mode), weak AC fields in DC field biased state, and frequency dependence, are very close to the modeling results. Due to the large field induced strain and high frequency capability of the electrostrictive P(VDF-TrFE), the device possesses the capability of operation at non-resonance mode with high displacement and force output, and hence, the device is capable to be used over a broad frequency range. For example, for a device of 1 mm lateral dimension, the displacement output can reach more than 50 μm and the ratio of the displacement/applied voltage is more than 20 nm/Vrms. Furthermore, over more than 3 frequency decades (up to 100 kHz), the dispersion of the displacement is less than 20%. The observed performance of the devices indicates that this class of the electrostrictive P(VDF-TrFE) based micro-actuators is attractive for micropumps and valves.

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