Investigation of PVD-DLC thin films manufactured using HIPIMS etch / unbalanced magnetron sputter (UBM) deposition and secondary mechano-chemical modification

L. A. Donohue, A. Torosyan, P. May, Douglas Edward Wolfe, J. Kulik, Timothy John Eden

Research output: Contribution to specialist publicationArticle

6 Citations (Scopus)

Abstract

PVD diamond-like-carbon (DLC) coatings are finding increasing industrial acceptance in automotive, aerospace and medical applications due to their reduced friction and low wear coefficient. Very recently, High Power Impulse Magnetron Sputter (HIPIMS) sources have been shown to produce fluxes with very high metal ion fractions similar to those produced by arc evaporation sources, without showing excessive heating and droplet formation characteristics. These new source properties now enable industrial-scale low temperature operation, low roughness and high efficiency etching of the substrate prior to deposition to deliver enhanced adhesion. In this paper, we report on the properties and performance of HIPIMS-etched titanium-containing DLC (Me-DLC) and metal-free (graphite-based) C-DLC films deposited at temperatures below 160°C.

Original languageEnglish (US)
Pages38-46
Number of pages9
Volume96
No2
Specialist publicationPlating and Surface Finishing
StatePublished - Mar 1 2009

Fingerprint

Sputter deposition
Diamond
Carbon films
Chemical modification
Physical vapor deposition
impulses
Diamonds
Carbon
diamonds
Thin films
carbon
thin films
Low temperature operations
Diamond like carbon films
Aerospace applications
Graphite
Medical applications
Titanium
Metal ions
Etching

All Science Journal Classification (ASJC) codes

  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

@misc{293dcb818de94bc190784f54d24bc842,
title = "Investigation of PVD-DLC thin films manufactured using HIPIMS etch / unbalanced magnetron sputter (UBM) deposition and secondary mechano-chemical modification",
abstract = "PVD diamond-like-carbon (DLC) coatings are finding increasing industrial acceptance in automotive, aerospace and medical applications due to their reduced friction and low wear coefficient. Very recently, High Power Impulse Magnetron Sputter (HIPIMS) sources have been shown to produce fluxes with very high metal ion fractions similar to those produced by arc evaporation sources, without showing excessive heating and droplet formation characteristics. These new source properties now enable industrial-scale low temperature operation, low roughness and high efficiency etching of the substrate prior to deposition to deliver enhanced adhesion. In this paper, we report on the properties and performance of HIPIMS-etched titanium-containing DLC (Me-DLC) and metal-free (graphite-based) C-DLC films deposited at temperatures below 160°C.",
author = "Donohue, {L. A.} and A. Torosyan and P. May and Wolfe, {Douglas Edward} and J. Kulik and Eden, {Timothy John}",
year = "2009",
month = "3",
day = "1",
language = "English (US)",
volume = "96",
pages = "38--46",
journal = "Plating and Surface Finishing",
issn = "0360-3164",
publisher = "American Electroplaters and Surface Finishers Soc. Inc.",

}

Investigation of PVD-DLC thin films manufactured using HIPIMS etch / unbalanced magnetron sputter (UBM) deposition and secondary mechano-chemical modification. / Donohue, L. A.; Torosyan, A.; May, P.; Wolfe, Douglas Edward; Kulik, J.; Eden, Timothy John.

In: Plating and Surface Finishing, Vol. 96, No. 2, 01.03.2009, p. 38-46.

Research output: Contribution to specialist publicationArticle

TY - GEN

T1 - Investigation of PVD-DLC thin films manufactured using HIPIMS etch / unbalanced magnetron sputter (UBM) deposition and secondary mechano-chemical modification

AU - Donohue, L. A.

AU - Torosyan, A.

AU - May, P.

AU - Wolfe, Douglas Edward

AU - Kulik, J.

AU - Eden, Timothy John

PY - 2009/3/1

Y1 - 2009/3/1

N2 - PVD diamond-like-carbon (DLC) coatings are finding increasing industrial acceptance in automotive, aerospace and medical applications due to their reduced friction and low wear coefficient. Very recently, High Power Impulse Magnetron Sputter (HIPIMS) sources have been shown to produce fluxes with very high metal ion fractions similar to those produced by arc evaporation sources, without showing excessive heating and droplet formation characteristics. These new source properties now enable industrial-scale low temperature operation, low roughness and high efficiency etching of the substrate prior to deposition to deliver enhanced adhesion. In this paper, we report on the properties and performance of HIPIMS-etched titanium-containing DLC (Me-DLC) and metal-free (graphite-based) C-DLC films deposited at temperatures below 160°C.

AB - PVD diamond-like-carbon (DLC) coatings are finding increasing industrial acceptance in automotive, aerospace and medical applications due to their reduced friction and low wear coefficient. Very recently, High Power Impulse Magnetron Sputter (HIPIMS) sources have been shown to produce fluxes with very high metal ion fractions similar to those produced by arc evaporation sources, without showing excessive heating and droplet formation characteristics. These new source properties now enable industrial-scale low temperature operation, low roughness and high efficiency etching of the substrate prior to deposition to deliver enhanced adhesion. In this paper, we report on the properties and performance of HIPIMS-etched titanium-containing DLC (Me-DLC) and metal-free (graphite-based) C-DLC films deposited at temperatures below 160°C.

UR - http://www.scopus.com/inward/record.url?scp=78449302470&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78449302470&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:78449302470

VL - 96

SP - 38

EP - 46

JO - Plating and Surface Finishing

JF - Plating and Surface Finishing

SN - 0360-3164

ER -