Investigation of PVD DLC thin films manufactured using HIPIMS Etch / Unbalanced magnetron sputter (UBM) deposition and secondary mechano-chemical modification

L. A. Donohue, A. Torosyan, P. May, J. Kulik, D. E. Wolfe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Chemical Compounds

Engineering & Materials Science