Investigation of room-temperature ion beam hydrogenation for the removal of traps in silicon ion beam damaged metal-oxide-silicon structures

S. Kar, S Ashok

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

Electrically active defects were generated in metal-oxide-silicon (MOS) structures by implantation of 16 keV Si ions into the oxide (350 Å thick) of oxidized silicon wafers. Subsequently, hydrogenation was carried out at room temperature by 400 eV H ions from a Kaufman source. To examine the nature of interaction between the H ions and the electronic traps and the efficacy of ion beam hydrogenation, current-voltage, and comprehensive admittance-voltage- frequency measurements were made. The measured data were analyzed to yield information on the trap and other important parameters of the MOS structure. The experimental data indicated impressive passivation of the ion beam induced damage by room-temperature hydrogenation. Many and most of the insiduous effects of radiation damage were removed, some completely. However, the results also indicated generation of some H-defect complexes during hydrogenation, leading to residual traps in the hydrogenated samples.

Original languageEnglish (US)
Pages (from-to)2187-2195
Number of pages9
JournalJournal of Applied Physics
Volume73
Issue number5
DOIs
StatePublished - Dec 1 1993

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hydrogenation
metal oxides
ion beams
traps
silicon
room temperature
ions
defects
frequency measurement
electric potential
electrical impedance
radiation damage
passivity
implantation
wafers
damage
oxides
electronics
interactions

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

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abstract = "Electrically active defects were generated in metal-oxide-silicon (MOS) structures by implantation of 16 keV Si ions into the oxide (350 {\AA} thick) of oxidized silicon wafers. Subsequently, hydrogenation was carried out at room temperature by 400 eV H ions from a Kaufman source. To examine the nature of interaction between the H ions and the electronic traps and the efficacy of ion beam hydrogenation, current-voltage, and comprehensive admittance-voltage- frequency measurements were made. The measured data were analyzed to yield information on the trap and other important parameters of the MOS structure. The experimental data indicated impressive passivation of the ion beam induced damage by room-temperature hydrogenation. Many and most of the insiduous effects of radiation damage were removed, some completely. However, the results also indicated generation of some H-defect complexes during hydrogenation, leading to residual traps in the hydrogenated samples.",
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Investigation of room-temperature ion beam hydrogenation for the removal of traps in silicon ion beam damaged metal-oxide-silicon structures. / Kar, S.; Ashok, S.

In: Journal of Applied Physics, Vol. 73, No. 5, 01.12.1993, p. 2187-2195.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Investigation of room-temperature ion beam hydrogenation for the removal of traps in silicon ion beam damaged metal-oxide-silicon structures

AU - Kar, S.

AU - Ashok, S

PY - 1993/12/1

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AB - Electrically active defects were generated in metal-oxide-silicon (MOS) structures by implantation of 16 keV Si ions into the oxide (350 Å thick) of oxidized silicon wafers. Subsequently, hydrogenation was carried out at room temperature by 400 eV H ions from a Kaufman source. To examine the nature of interaction between the H ions and the electronic traps and the efficacy of ion beam hydrogenation, current-voltage, and comprehensive admittance-voltage- frequency measurements were made. The measured data were analyzed to yield information on the trap and other important parameters of the MOS structure. The experimental data indicated impressive passivation of the ion beam induced damage by room-temperature hydrogenation. Many and most of the insiduous effects of radiation damage were removed, some completely. However, the results also indicated generation of some H-defect complexes during hydrogenation, leading to residual traps in the hydrogenated samples.

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