Investigation of the viscoelastic properties of liquids trapped in nanoporous cavities using micromachined acoustic transducers

Hwall Min, David Allara, Srinivas A. Tadigadapa

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

We have designed and fabricated 60 MHz bulk acoustic wave transducers and demonstrated the efficacy of these devices for probing the gravimetric and viscoelastic properties of layers in intimate contact with one of the electrodes. By integrating a 100 nm thick nanoporous film as the top electrode of the quartz resonator, we have been able to obtain enhanced sensitivity to mass loading and investigate the physical properties of liquids confined within 25-35 nm pores. By experimentally measuring the change in resonance frequency and Q-factor at the first and third resonance modes and using a detailed acoustic model in which the trapped liquid is treated as viscoelastic layer under a viscous liquid, the properties of trapped water-glycerol mixture confined in nanopores has been deduced.

Original languageEnglish (US)
Pages (from-to)631-634
Number of pages4
JournalProcedia Engineering
Volume25
DOIs
StatePublished - Dec 1 2011
Event25th Eurosensors Conference - Athens, Greece
Duration: Sep 4 2011Sep 7 2011

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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