Multiphoton resonance ionization (MPRI) of sputtered neutrals is compared to low dose secondary ion mass spectrometry via the chemisorption of oxygen on polycrystalline indium. The results show that the In and In2 yields decrease with oxidation while the In+ and In2 + yields increase dramatically. The behavior of the In2/In ratio is similar to that of the In2 +/In+ ratio. The high sensitivity of MPRI indicates there should be a number of advantages of this technique over SIMS for surface characterization studies.
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry