Ion and neutral yields from ion bombarded metal surfaces during chemisorption using low dose SIMS and multiphoton resonance ionization

F. M. Kimock, J. P. Baxter, N. Winograd

Research output: Contribution to journalArticle

53 Scopus citations

Abstract

Multiphoton resonance ionization (MPRI) of sputtered neutrals is compared to low dose secondary ion mass spectrometry via the chemisorption of oxygen on polycrystalline indium. The results show that the In and In2 yields decrease with oxidation while the In+ and In2 + yields increase dramatically. The behavior of the In2/In ratio is similar to that of the In2 +/In+ ratio. The high sensitivity of MPRI indicates there should be a number of advantages of this technique over SIMS for surface characterization studies.

Original languageEnglish (US)
Pages (from-to)L41-L48
JournalSurface Science
Volume124
Issue number2-3
DOIs
StatePublished - Jan 2 1983

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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