Isolating a scanning electron microscope from chiller unit vibrations

B. R. Barben, Linda Morley Hanagan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Although a scanning electron microscope (SEM) has very low tolerance to being disturbed by vibration, it requires a chiller for operation. Isolating the SEM from its associated chiller vibration takes careful consideration. This paper presents a case study of the performance of several slab-on-grade configurations. These configurations were specifically constructed to support various water chiller units and other service equipment as well as various vibration sensitive microscopes in a high performance research facility. In this study, the slabs are subjected to shaker-induced harmonic loading similar to that of a water chiller unit used to cool a SEM. The actual performance will be discussed in the context of generic design criteria for sensitive equipment and the SEM manufacturer-specified design criteria.

Original languageEnglish (US)
Title of host publicationDynamics of Civil Structures - Proceedings of the 33rd IMAC, A Conference and Exposition on Structural Dynamics, 2015
PublisherSpringer New York LLC
Pages531-540
Number of pages10
Volume2
ISBN (Print)9783319152479
DOIs
StatePublished - 2015
Event33rd IMAC, Conference and Exposition on Balancing Simulation and Testing, 2015 - Orlando, United States
Duration: Feb 2 2015Feb 5 2015

Other

Other33rd IMAC, Conference and Exposition on Balancing Simulation and Testing, 2015
CountryUnited States
CityOrlando
Period2/2/152/5/15

Fingerprint

Electron microscopes
Scanning
Water
Microscopes

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Computational Mechanics
  • Mechanical Engineering

Cite this

Barben, B. R., & Hanagan, L. M. (2015). Isolating a scanning electron microscope from chiller unit vibrations. In Dynamics of Civil Structures - Proceedings of the 33rd IMAC, A Conference and Exposition on Structural Dynamics, 2015 (Vol. 2, pp. 531-540). Springer New York LLC. https://doi.org/10.1007/978-3-319-15248-6_53
Barben, B. R. ; Hanagan, Linda Morley. / Isolating a scanning electron microscope from chiller unit vibrations. Dynamics of Civil Structures - Proceedings of the 33rd IMAC, A Conference and Exposition on Structural Dynamics, 2015. Vol. 2 Springer New York LLC, 2015. pp. 531-540
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Barben, BR & Hanagan, LM 2015, Isolating a scanning electron microscope from chiller unit vibrations. in Dynamics of Civil Structures - Proceedings of the 33rd IMAC, A Conference and Exposition on Structural Dynamics, 2015. vol. 2, Springer New York LLC, pp. 531-540, 33rd IMAC, Conference and Exposition on Balancing Simulation and Testing, 2015, Orlando, United States, 2/2/15. https://doi.org/10.1007/978-3-319-15248-6_53

Isolating a scanning electron microscope from chiller unit vibrations. / Barben, B. R.; Hanagan, Linda Morley.

Dynamics of Civil Structures - Proceedings of the 33rd IMAC, A Conference and Exposition on Structural Dynamics, 2015. Vol. 2 Springer New York LLC, 2015. p. 531-540.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Barben BR, Hanagan LM. Isolating a scanning electron microscope from chiller unit vibrations. In Dynamics of Civil Structures - Proceedings of the 33rd IMAC, A Conference and Exposition on Structural Dynamics, 2015. Vol. 2. Springer New York LLC. 2015. p. 531-540 https://doi.org/10.1007/978-3-319-15248-6_53