Isotopic Studies of Oxidation of Si3N4 and Si using SIMS

Honghua Du, Cheryl A. Houser, Richard E. Tressler, Karl E. Spear, Carlo G. Pantano

Research output: Contribution to journalArticle

16 Citations (Scopus)
Original languageEnglish (US)
Pages (from-to)741-742
Number of pages2
JournalJournal of the Electrochemical Society
Volume137
Issue number2
DOIs
StatePublished - Jan 1 1990

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Mass spectrometers
Secondary ion mass spectrometry
Radioisotopes
secondary ion mass spectrometry
mass spectrometers
Oxidation
oxidation
silicon nitride

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

Cite this

Du, H., Houser, C. A., Tressler, R. E., Spear, K. E., & Pantano, C. G. (1990). Isotopic Studies of Oxidation of Si3N4 and Si using SIMS. Journal of the Electrochemical Society, 137(2), 741-742. https://doi.org/10.1149/1.2086543
Du, Honghua ; Houser, Cheryl A. ; Tressler, Richard E. ; Spear, Karl E. ; Pantano, Carlo G. / Isotopic Studies of Oxidation of Si3N4 and Si using SIMS. In: Journal of the Electrochemical Society. 1990 ; Vol. 137, No. 2. pp. 741-742.
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Du, H, Houser, CA, Tressler, RE, Spear, KE & Pantano, CG 1990, 'Isotopic Studies of Oxidation of Si3N4 and Si using SIMS', Journal of the Electrochemical Society, vol. 137, no. 2, pp. 741-742. https://doi.org/10.1149/1.2086543

Isotopic Studies of Oxidation of Si3N4 and Si using SIMS. / Du, Honghua; Houser, Cheryl A.; Tressler, Richard E.; Spear, Karl E.; Pantano, Carlo G.

In: Journal of the Electrochemical Society, Vol. 137, No. 2, 01.01.1990, p. 741-742.

Research output: Contribution to journalArticle

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AU - Pantano, Carlo G.

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