Isotopic Studies of Oxidation of Si3N4 and Si using SIMS

Honghua Du, Cheryl A. Houser, Richard E. Tressler, Karl E. Spear, Carlo G. Pantano

Research output: Contribution to journalArticlepeer-review

16 Scopus citations
Original languageEnglish (US)
Pages (from-to)741-742
Number of pages2
JournalJournal of the Electrochemical Society
Volume137
Issue number2
DOIs
StatePublished - Feb 1990

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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