Large-angle electro-optic laser scanner on LiTaO3 fabricated by in situ monitoring of ferroelectric-domain micropatterning

David A. Scrymgeour, Yaniv Barad, Venkatraman Gopalan, Kevin T. Gahagan, Quanxi Jia, Terence E. Mitchell, Jeanne M. Robinson

Research output: Contribution to journalArticle

56 Citations (Scopus)

Abstract

We report on a horn-shaped electro-optic scanner based on a ferroelectric LiTaO3 wafer that is capable of scanning 632.8-nm light by an unprecedented 14.88° angle for extraordinary polarized light and by 4.05° for ordinary polarized light. The device concept is based on micropatterning ferroelectric domains in the shape of a series of optimized prisms whose refractive index is electric field tunable through the electro-optic effect. We demonstrate what we believe is a novel technique of using electro-optic imaging microscopy for in situ monitoring of the process of domain micropatterning during device fabrication, thus eliminating imperfect process control based on ex situ monitoring of transient currents.

Original languageEnglish (US)
Pages (from-to)6236-6241
Number of pages6
JournalApplied Optics
Volume40
Issue number34
DOIs
StatePublished - Dec 1 2001

Fingerprint

Electrooptical effects
scanners
electro-optics
Ferroelectric materials
Light polarization
polarized light
Lasers
Monitoring
lasers
Prisms
prisms
Process control
Refractive index
Microscopic examination
Electric fields
wafers
refractivity
microscopy
Scanning
Imaging techniques

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Cite this

Scrymgeour, David A. ; Barad, Yaniv ; Gopalan, Venkatraman ; Gahagan, Kevin T. ; Jia, Quanxi ; Mitchell, Terence E. ; Robinson, Jeanne M. / Large-angle electro-optic laser scanner on LiTaO3 fabricated by in situ monitoring of ferroelectric-domain micropatterning. In: Applied Optics. 2001 ; Vol. 40, No. 34. pp. 6236-6241.
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Large-angle electro-optic laser scanner on LiTaO3 fabricated by in situ monitoring of ferroelectric-domain micropatterning. / Scrymgeour, David A.; Barad, Yaniv; Gopalan, Venkatraman; Gahagan, Kevin T.; Jia, Quanxi; Mitchell, Terence E.; Robinson, Jeanne M.

In: Applied Optics, Vol. 40, No. 34, 01.12.2001, p. 6236-6241.

Research output: Contribution to journalArticle

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