Large Stroke and Low Profile Single Crystal Piezoelectric Actuators

Xiaoning Jiang, Paul W. Rehrig, Wesley S. Hackenberger, Thomas R. Shrout

Research output: Contribution to journalConference article

4 Citations (Scopus)

Abstract

TRS single crystal plates with special crystal orientations and dimensions of 10 × 5 × 0.5 mm were prepared, and the in- plane strain-electric field behavior was measured using a modified Sawyer-Tower circuit with an LVDT. A d32 coefficient as high as -1600 pm/V was observed which is 60-75% higher than d31 in the conventional cut crystal. The increased performance of this cut can be directly applied to bending mode actuators and other devices that utilize the d31 mode. The strain response was both linear and non-hysteretic up to 15 kV/cm. Large stroke and highly directional strain was also achieved from a quasi-d33 mode single crystal plate with interdigital electrodes (IDE). These were prepared with plate thickness of 0.2 mm, and an effective d33 1000 pC/N was obtained under 10 KV/cm driving field. Both types of plate actuators show at least 5 times larger piezoelectric coefficient than the d31 of PZT materials. Amplified out-of-plane stroke could be easily achieved by integrating the developed thin plate actuators into unimorph, bimorph, or moonie structures.

Original languageEnglish (US)
Pages (from-to)436-444
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5053
DOIs
StatePublished - Nov 27 2003
EventPROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Smart Structures and Materials 2003 Active Materials: Behavior and Mechanics - San Diego, CA, United States
Duration: Mar 3 2003Mar 6 2003

Fingerprint

Piezoelectric Actuator
piezoelectric actuators
Piezoelectric actuators
Single Crystal
strokes
Stroke
Actuators
Single crystals
Actuator
actuators
single crystals
profiles
Crystal
Crystal orientation
Towers
thin plates
plane strain
Plane Strain
p.m.
Thin Plate

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Jiang, Xiaoning ; Rehrig, Paul W. ; Hackenberger, Wesley S. ; Shrout, Thomas R. / Large Stroke and Low Profile Single Crystal Piezoelectric Actuators. In: Proceedings of SPIE - The International Society for Optical Engineering. 2003 ; Vol. 5053. pp. 436-444.
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Large Stroke and Low Profile Single Crystal Piezoelectric Actuators. / Jiang, Xiaoning; Rehrig, Paul W.; Hackenberger, Wesley S.; Shrout, Thomas R.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5053, 27.11.2003, p. 436-444.

Research output: Contribution to journalConference article

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T1 - Large Stroke and Low Profile Single Crystal Piezoelectric Actuators

AU - Jiang, Xiaoning

AU - Rehrig, Paul W.

AU - Hackenberger, Wesley S.

AU - Shrout, Thomas R.

PY - 2003/11/27

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N2 - TRS single crystal plates with special crystal orientations and dimensions of 10 × 5 × 0.5 mm were prepared, and the in- plane strain-electric field behavior was measured using a modified Sawyer-Tower circuit with an LVDT. A d32 coefficient as high as -1600 pm/V was observed which is 60-75% higher than d31 in the conventional cut crystal. The increased performance of this cut can be directly applied to bending mode actuators and other devices that utilize the d31 mode. The strain response was both linear and non-hysteretic up to 15 kV/cm. Large stroke and highly directional strain was also achieved from a quasi-d33 mode single crystal plate with interdigital electrodes (IDE). These were prepared with plate thickness of 0.2 mm, and an effective d33 1000 pC/N was obtained under 10 KV/cm driving field. Both types of plate actuators show at least 5 times larger piezoelectric coefficient than the d31 of PZT materials. Amplified out-of-plane stroke could be easily achieved by integrating the developed thin plate actuators into unimorph, bimorph, or moonie structures.

AB - TRS single crystal plates with special crystal orientations and dimensions of 10 × 5 × 0.5 mm were prepared, and the in- plane strain-electric field behavior was measured using a modified Sawyer-Tower circuit with an LVDT. A d32 coefficient as high as -1600 pm/V was observed which is 60-75% higher than d31 in the conventional cut crystal. The increased performance of this cut can be directly applied to bending mode actuators and other devices that utilize the d31 mode. The strain response was both linear and non-hysteretic up to 15 kV/cm. Large stroke and highly directional strain was also achieved from a quasi-d33 mode single crystal plate with interdigital electrodes (IDE). These were prepared with plate thickness of 0.2 mm, and an effective d33 1000 pC/N was obtained under 10 KV/cm driving field. Both types of plate actuators show at least 5 times larger piezoelectric coefficient than the d31 of PZT materials. Amplified out-of-plane stroke could be easily achieved by integrating the developed thin plate actuators into unimorph, bimorph, or moonie structures.

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