Laser-assisted writing of copper films through Nd:YAG laser radiation

R. Martukanitz, R. Harster, D. Conklin, S. Wagner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The use of a laser-assisted process for direct writing of copper films and coatings has significant potential for several applications within the electronics industry. Experiments were conducted using a pulsed Nd:YAG (1064 nm) laser to irradiate a metallo-organic precursor film that had been predeposited onto glass and FR-4 substrates. Parameters that were investigated included irradiation wavelength, pulsing conditions, precursor thickness, and the use of inert and active shielding gas. Scanning electron microscopy, energy dispersive x-ray spectroscopy, and electrical resistivity measurements were used to characterize the processed specimens. Initial results of these experiments indicated that Nd:YAG irradiation resulted in decomposition of the precursor and deposition of copper; although, the crystalline deposits contained varying levels of oxide. It is believed that the decomposition mechanism is pyrolytic.

Original languageEnglish (US)
Title of host publicationICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings
Publication statusPublished - Dec 1 2004
EventICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics - San Francisco, CA, United States
Duration: Oct 4 2004Oct 7 2004

Publication series

NameICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Other

OtherICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics
CountryUnited States
CitySan Francisco, CA
Period10/4/0410/7/04

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All Science Journal Classification (ASJC) codes

  • Geochemistry and Petrology
  • Electrical and Electronic Engineering

Cite this

Martukanitz, R., Harster, R., Conklin, D., & Wagner, S. (2004). Laser-assisted writing of copper films through Nd:YAG laser radiation. In ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings (ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings).