Laser dynamic forming of functional materials laminated composites on patterned three-dimensional surfaces with applications on flexible microelectromechanical systems

Laser dynamic forming (LDF) is a three-dimensional (3D) forming technique, which utilizes laser to induce shock wave and shape the target thin films onto micro/nanoscale 3D surfaces. This technique has been used to form metals on 3D surfaces. This letter extends LDF to functional and brittle materials sandwiched by elastomeric polymers on patterned 3D surface. The elastomeric polymers absorb the shock energy and minimize the degradation of the functional materials. The patterned 3D surfaces control the plasticity in the structure and therefore retain the function of the structure. The performance was evaluated and mechanisms were studied.