Laser-machined piezoelectric cantilevers for mechanical energy harvesting

Hyun Uk Kim, Vishwas Bedekar, Rashed Adnan Islam, Woo Ho Lee, Don Leo, Shashank Priya

Research output: Contribution to journalArticle

39 Citations (Scopus)

Abstract

In this study, we report results on a piezoelectric-material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8m/s2). The device was found to generate continuous power of 1.13 μW at 870 Hz across a 288.5 kΩ load with a power density of 301.3 μW/cm3.

Original languageEnglish (US)
Article number4626918
Pages (from-to)1900-1905
Number of pages6
JournalIEEE transactions on ultrasonics, ferroelectrics, and frequency control
Volume55
Issue number9
DOIs
StatePublished - Sep 1 2008

Fingerprint

Piezoelectric materials
Energy harvesting
Machining
laser machining
Lasers
Microelectronics
lasers
Packaging
Electric properties
packaging
microelectronics
energy
radiant flux density
electrical properties
low frequencies

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

Cite this

Kim, Hyun Uk ; Bedekar, Vishwas ; Islam, Rashed Adnan ; Lee, Woo Ho ; Leo, Don ; Priya, Shashank. / Laser-machined piezoelectric cantilevers for mechanical energy harvesting. In: IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2008 ; Vol. 55, No. 9. pp. 1900-1905.
@article{e81325b106ac42f4bef07c0c22825297,
title = "Laser-machined piezoelectric cantilevers for mechanical energy harvesting",
abstract = "In this study, we report results on a piezoelectric-material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8m/s2). The device was found to generate continuous power of 1.13 μW at 870 Hz across a 288.5 kΩ load with a power density of 301.3 μW/cm3.",
author = "Kim, {Hyun Uk} and Vishwas Bedekar and Islam, {Rashed Adnan} and Lee, {Woo Ho} and Don Leo and Shashank Priya",
year = "2008",
month = "9",
day = "1",
doi = "10.1109/TUFFC.881",
language = "English (US)",
volume = "55",
pages = "1900--1905",
journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",
issn = "0885-3010",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "9",

}

Laser-machined piezoelectric cantilevers for mechanical energy harvesting. / Kim, Hyun Uk; Bedekar, Vishwas; Islam, Rashed Adnan; Lee, Woo Ho; Leo, Don; Priya, Shashank.

In: IEEE transactions on ultrasonics, ferroelectrics, and frequency control, Vol. 55, No. 9, 4626918, 01.09.2008, p. 1900-1905.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Laser-machined piezoelectric cantilevers for mechanical energy harvesting

AU - Kim, Hyun Uk

AU - Bedekar, Vishwas

AU - Islam, Rashed Adnan

AU - Lee, Woo Ho

AU - Leo, Don

AU - Priya, Shashank

PY - 2008/9/1

Y1 - 2008/9/1

N2 - In this study, we report results on a piezoelectric-material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8m/s2). The device was found to generate continuous power of 1.13 μW at 870 Hz across a 288.5 kΩ load with a power density of 301.3 μW/cm3.

AB - In this study, we report results on a piezoelectric-material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8m/s2). The device was found to generate continuous power of 1.13 μW at 870 Hz across a 288.5 kΩ load with a power density of 301.3 μW/cm3.

UR - http://www.scopus.com/inward/record.url?scp=52749088724&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=52749088724&partnerID=8YFLogxK

U2 - 10.1109/TUFFC.881

DO - 10.1109/TUFFC.881

M3 - Article

C2 - 18986886

AN - SCOPUS:52749088724

VL - 55

SP - 1900

EP - 1905

JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

SN - 0885-3010

IS - 9

M1 - 4626918

ER -