Lead-zirconate-titanate-based piezoelectric micromachined switch

S. J. Gross, S. Tadlgadapa, T. N. Jackson, S. Trolier-McKinstry, Q. Q. Zhang

Research output: Contribution to journalArticle

82 Scopus citations

Abstract

A piezoelectric micromachined switch actuated by lead zirconate titanate (PZT) was studied. A PZT unimorph cantilever actuator, fabricated on a sacrificial polysilicon layer, was used to realize the switch. The PZT thin film was poled and driven with interdigitated electrodes to exploit the d33 coefficient for switching actuation.

Original languageEnglish (US)
Pages (from-to)174-176
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number1
DOIs
StatePublished - Jul 7 2003

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'Lead-zirconate-titanate-based piezoelectric micromachined switch'. Together they form a unique fingerprint.

  • Cite this