A piezoelectric micromachined switch actuated by lead zirconate titanate (PZT) was studied. A PZT unimorph cantilever actuator, fabricated on a sacrificial polysilicon layer, was used to realize the switch. The PZT thin film was poled and driven with interdigitated electrodes to exploit the d33 coefficient for switching actuation.
|Original language||English (US)|
|Number of pages||3|
|Journal||Applied Physics Letters|
|State||Published - Jul 7 2003|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)