Lead-zirconate-titanate-based piezoelectric micromachined switch

S. J. Gross; S. Tadlgadapa; T. N. Jackson; S. Trolier-McKinstry; Q. Q. Zhang

doi:10.1063/1.1589192

Lead-zirconate-titanate-based piezoelectric micromachined switch

S. J. Gross, S. Tadlgadapa, T. N. Jackson, S. Trolier-McKinstry, Q. Q. Zhang

Research output: Contribution to journal › Article › peer-review

92 Scopus citations

Abstract

A piezoelectric micromachined switch actuated by lead zirconate titanate (PZT) was studied. A PZT unimorph cantilever actuator, fabricated on a sacrificial polysilicon layer, was used to realize the switch. The PZT thin film was poled and driven with interdigitated electrodes to exploit the d₃₃ coefficient for switching actuation.

Original language	English (US)
Pages (from-to)	174-176
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	1
DOIs	https://doi.org/10.1063/1.1589192
State	Published - Jul 7 2003

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.1589192

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abstract = "A piezoelectric micromachined switch actuated by lead zirconate titanate (PZT) was studied. A PZT unimorph cantilever actuator, fabricated on a sacrificial polysilicon layer, was used to realize the switch. The PZT thin film was poled and driven with interdigitated electrodes to exploit the d33 coefficient for switching actuation.",

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AU - Gross, S. J.

AU - Tadlgadapa, S.

AU - Jackson, T. N.

AU - Trolier-McKinstry, S.

AU - Zhang, Q. Q.

PY - 2003/7/7

Y1 - 2003/7/7

N2 - A piezoelectric micromachined switch actuated by lead zirconate titanate (PZT) was studied. A PZT unimorph cantilever actuator, fabricated on a sacrificial polysilicon layer, was used to realize the switch. The PZT thin film was poled and driven with interdigitated electrodes to exploit the d33 coefficient for switching actuation.

AB - A piezoelectric micromachined switch actuated by lead zirconate titanate (PZT) was studied. A PZT unimorph cantilever actuator, fabricated on a sacrificial polysilicon layer, was used to realize the switch. The PZT thin film was poled and driven with interdigitated electrodes to exploit the d33 coefficient for switching actuation.

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Lead-zirconate-titanate-based piezoelectric micromachined switch

Abstract

All Science Journal Classification (ASJC) codes

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