A piezoelectric micromachined switch actuated by lead zirconate titanate (PZT) was studied. A PZT unimorph cantilever actuator, fabricated on a sacrificial polysilicon layer, was used to realize the switch. The PZT thin film was poled and driven with interdigitated electrodes to exploit the d33 coefficient for switching actuation.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)