Piezoelectric Pb(Zr0.52Ti0.48)O3 (PZT 52/48) cantilever actuators that operate in the d33 mode were fabricated using surface micromaching techniques. The cantilevers are composed of a PZT thin film on a low stress silicon nitride (SixNy) support buffered by a layer of ZrO2. Au/Cr interdigitated (IDT) electrodes were deposited on the PZT film surface, so that the cantilever could be poled and actuated in the d33 mode. The PZT deposited on the ZrO2/SixNy/Si stack is well-crystallized into the perovskite phase and is randomly oriented. It exhibits good ferroelectric behavior with a remanent polarization of 26 μC/cm2. The cantilevers have a width of 100 μm and lengths between 130 and 280 μm. The fundamental resonance frequencies are in the range of 6.1-29.6 kHz. When actuated with an applied electric voltage of 100 V, the 280 μm long cantilever exhibits a large downward tip displacement of 30 μm.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering