Lead zirconate titanate films prepared by liquid source misted chemical deposition

V. Koval, S. S.N. Bharadwaja, Susan E. Trolier-McKinstry

Research output: Contribution to journalArticle

Abstract

In this study, lead zirconate titanate (PZT) thin Alms were prepared by liquid source misted chemical deposition (LSMCD) method and their structural and electrical properties were investigated. The LSMCD technique utilizes micron-sized droplets of an organic based liquid precursor to produce high quality thin films with good conformality and uniformity. PZT films, annealed at temperature of 750 °C for 1 min in oxygen ambient, were polycrystalline and exhibited good phase purity with a (111)-preferred crystallographic orientation. The capacitance voltage (C-V) and polarization electric field (P-E) hysteresis measurements in wide frequency range showed that mist deposited PZT films exhibited the electrical properties comparable with those of other processing methods.

Original languageEnglish (US)
Pages (from-to)361-365
Number of pages5
JournalKovove Materialy
Volume48
Issue number6
DOIs
StatePublished - Jan 1 2010

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All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry

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