The OAQC (optimizing adaptive quality controller) is a process optimization and control software tool recently developed for application in run-to-run (R2R) manufacturing environments. Its most recent version is the result of the evolution of R2R applications of adaptive control techniques for linear unconstrained single input, single output (SISO) systems; liner unconstrained multiple input, multiple output (MIMO) systems; and nonlinear, constrained MIMO systems.
|Original language||English (US)|
|Title of host publication||Run-to-Run Control in Semiconductor Manufacturing|
|Number of pages||9|
|ISBN (Print)||0849311780, 9780849311789|
|State||Published - Jan 1 2000|
All Science Journal Classification (ASJC) codes