Length-scale dependence of elasticity in nanocrystalline materials for mems applications

M. A. Haque, M. T.A. Saif

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Length-scale dependence of the elastic properties of thin film materials bears significance in the design of Micro-electronic and Micro-electro- mechanical (MEMS) systems , which are usually desired to operate in the elastic range under different operational loading conditions. In this study, we investigate elastic properties of freestanding ultra-high purity Aluminum and Gold thin films with thickness varying from 30 to 350 nanometers. Uniaxial tension test results indicate that for truly polycrystalline films , Young's modulus can be as low as 85% and 60% of the bulk value for Aluminum and Gold respectively with average grain size of 20 nanometers. We present, for the first time, the evidence of non-linear elasticity with total strain up to 1.0% in nanocrystalline thin films and attempt to provide fundamental understanding of the length-scale dependence of elasticity in thin films with a simple model based on inter-atomic force-distance relationships.

Original languageEnglish (US)
Title of host publicationMicroelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages161-164
Number of pages4
ISBN (Print)0791836428, 9780791836422
DOIs
StatePublished - Jan 1 2002

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering

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    Haque, M. A., & Saif, M. T. A. (2002). Length-scale dependence of elasticity in nanocrystalline materials for mems applications. In Microelectromechanical Systems (pp. 161-164). (ASME International Mechanical Engineering Congress and Exposition, Proceedings). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2002-33297