Local electrode atom probe analysis of silicon nanowires grown with an aluminum catalyst

Chad M. Eichfeld, Stephan S.A. Gerstl, Ty Prosa, Yue Ke, Joan M. Redwing, Suzanne E. Mohney

Research output: Contribution to journalArticle

28 Scopus citations

Abstract

Local electrode atom probe (LEAP) tomography of Al-catalyzed silicon nanowires synthesized by the vaporliquidsolid method is presented. The concentration of Al within the Al-catalyzed nanowire was found to be 2×10 20cm -3, which is higher than the expected solubility limit for Al in Si at the nanowire growth temperature of 550°C. Reconstructions of the Al contained within the nanowire indicate a denuded region adjacent to the Al catalyst/Si nanowire interface, while Al clusters are distributed throughout the rest of the silicon nanowire.

Original languageEnglish (US)
Article number215205
JournalNanotechnology
Volume23
Issue number21
DOIs
StatePublished - Jun 1 2012

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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