Low frequency arc-based MEMS structures for vibration energy harvesting

Daniel J. Apo, Mohan Sanghadasa, Shashank Priya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

This study reports the novel arc-based cantilevers for reducing the natural frequency of MEMS cantilever beams without the addition of tip/point mass. The results show an increased potential for energy extraction from naturally occurring vibration sources. An analytical model was used to model the effective mechanical properties of multilayered MEMS cantilevers while the natural frequencies were obtained by applying a finite element code. Results were obtained for two geometries of arc-based cantilevers as well as their linear counterparts. These results demonstrate that arc-based cantilevers vibrate at frequencies significantly lower than their linear components (up to 40% reduction in natural frequency).

Original languageEnglish (US)
Title of host publication8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages615-618
Number of pages4
DOIs
StatePublished - Sep 2 2013
Event8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China
Duration: Apr 7 2013Apr 10 2013

Publication series

Name8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Other

Other8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
CountryChina
CitySuzhou
Period4/7/134/10/13

Fingerprint

Micro-Electrical-Mechanical Systems
Energy harvesting
Vibration
Vibrations (mechanical)
MEMS
Natural frequencies
Cantilever beams
Analytical models
Mechanical properties
Geometry

All Science Journal Classification (ASJC) codes

  • Biochemistry, Genetics and Molecular Biology (miscellaneous)
  • Biotechnology

Cite this

Apo, D. J., Sanghadasa, M., & Priya, S. (2013). Low frequency arc-based MEMS structures for vibration energy harvesting. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 615-618). [6559805] (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). https://doi.org/10.1109/NEMS.2013.6559805
Apo, Daniel J. ; Sanghadasa, Mohan ; Priya, Shashank. / Low frequency arc-based MEMS structures for vibration energy harvesting. 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. pp. 615-618 (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013).
@inproceedings{3231e7de7c4d4f5599fb1934ed0cc5b7,
title = "Low frequency arc-based MEMS structures for vibration energy harvesting",
abstract = "This study reports the novel arc-based cantilevers for reducing the natural frequency of MEMS cantilever beams without the addition of tip/point mass. The results show an increased potential for energy extraction from naturally occurring vibration sources. An analytical model was used to model the effective mechanical properties of multilayered MEMS cantilevers while the natural frequencies were obtained by applying a finite element code. Results were obtained for two geometries of arc-based cantilevers as well as their linear counterparts. These results demonstrate that arc-based cantilevers vibrate at frequencies significantly lower than their linear components (up to 40{\%} reduction in natural frequency).",
author = "Apo, {Daniel J.} and Mohan Sanghadasa and Shashank Priya",
year = "2013",
month = "9",
day = "2",
doi = "10.1109/NEMS.2013.6559805",
language = "English (US)",
isbn = "9781467363525",
series = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013",
pages = "615--618",
booktitle = "8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013",

}

Apo, DJ, Sanghadasa, M & Priya, S 2013, Low frequency arc-based MEMS structures for vibration energy harvesting. in 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013., 6559805, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, pp. 615-618, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, Suzhou, China, 4/7/13. https://doi.org/10.1109/NEMS.2013.6559805

Low frequency arc-based MEMS structures for vibration energy harvesting. / Apo, Daniel J.; Sanghadasa, Mohan; Priya, Shashank.

8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. p. 615-618 6559805 (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Low frequency arc-based MEMS structures for vibration energy harvesting

AU - Apo, Daniel J.

AU - Sanghadasa, Mohan

AU - Priya, Shashank

PY - 2013/9/2

Y1 - 2013/9/2

N2 - This study reports the novel arc-based cantilevers for reducing the natural frequency of MEMS cantilever beams without the addition of tip/point mass. The results show an increased potential for energy extraction from naturally occurring vibration sources. An analytical model was used to model the effective mechanical properties of multilayered MEMS cantilevers while the natural frequencies were obtained by applying a finite element code. Results were obtained for two geometries of arc-based cantilevers as well as their linear counterparts. These results demonstrate that arc-based cantilevers vibrate at frequencies significantly lower than their linear components (up to 40% reduction in natural frequency).

AB - This study reports the novel arc-based cantilevers for reducing the natural frequency of MEMS cantilever beams without the addition of tip/point mass. The results show an increased potential for energy extraction from naturally occurring vibration sources. An analytical model was used to model the effective mechanical properties of multilayered MEMS cantilevers while the natural frequencies were obtained by applying a finite element code. Results were obtained for two geometries of arc-based cantilevers as well as their linear counterparts. These results demonstrate that arc-based cantilevers vibrate at frequencies significantly lower than their linear components (up to 40% reduction in natural frequency).

UR - http://www.scopus.com/inward/record.url?scp=84883056446&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84883056446&partnerID=8YFLogxK

U2 - 10.1109/NEMS.2013.6559805

DO - 10.1109/NEMS.2013.6559805

M3 - Conference contribution

AN - SCOPUS:84883056446

SN - 9781467363525

T3 - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

SP - 615

EP - 618

BT - 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

ER -

Apo DJ, Sanghadasa M, Priya S. Low frequency arc-based MEMS structures for vibration energy harvesting. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. p. 615-618. 6559805. (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). https://doi.org/10.1109/NEMS.2013.6559805