Low frequency arc-based MEMS structures for vibration energy harvesting

Daniel J. Apo, Mohan Sanghadasa, Shashank Priya

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Abstract

This study reports the novel arc-based cantilevers for reducing the natural frequency of MEMS cantilever beams without the addition of tip/point mass. The results show an increased potential for energy extraction from naturally occurring vibration sources. An analytical model was used to model the effective mechanical properties of multilayered MEMS cantilevers while the natural frequencies were obtained by applying a finite element code. Results were obtained for two geometries of arc-based cantilevers as well as their linear counterparts. These results demonstrate that arc-based cantilevers vibrate at frequencies significantly lower than their linear components (up to 40% reduction in natural frequency).

Original languageEnglish (US)
Title of host publication8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
Pages615-618
Number of pages4
DOIs
StatePublished - Sep 2 2013
Event8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, China
Duration: Apr 7 2013Apr 10 2013

Publication series

Name8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

Other

Other8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
CountryChina
CitySuzhou
Period4/7/134/10/13

All Science Journal Classification (ASJC) codes

  • Biochemistry, Genetics and Molecular Biology (miscellaneous)
  • Biotechnology

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  • Cite this

    Apo, D. J., Sanghadasa, M., & Priya, S. (2013). Low frequency arc-based MEMS structures for vibration energy harvesting. In 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 615-618). [6559805] (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). https://doi.org/10.1109/NEMS.2013.6559805