The low-permittivity columnar thin films (LPCTFs) is used as low-permittivity, nanocomposite materials that is applied in microelectronics and electronic packaging. The design and engineering of LPCTFs to obtain desired anisotropic dielectric properties is demonstrated using a Bruggeman formalism. The performance of LPCTFs is improved through various enhancements. Surface modifications, such as fluorination to reduce the relative permittivity as well as to determine moisture adsorption in the internal surfaces, are viable because of the open porous structure.
|Original language||English (US)|
|Number of pages||5|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|State||Published - Jan 1 2000|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering