Low-permittivity nanocomposite materials using sculptured thin film technology

Vijayakumar C. Venugopal, Akhlesh Lakhtakia, Russell Messier, John Paul Kucera

Research output: Contribution to journalArticle

19 Scopus citations

Abstract

The low-permittivity columnar thin films (LPCTFs) is used as low-permittivity, nanocomposite materials that is applied in microelectronics and electronic packaging. The design and engineering of LPCTFs to obtain desired anisotropic dielectric properties is demonstrated using a Bruggeman formalism. The performance of LPCTFs is improved through various enhancements. Surface modifications, such as fluorination to reduce the relative permittivity as well as to determine moisture adsorption in the internal surfaces, are viable because of the open porous structure.

Original languageEnglish (US)
Pages (from-to)32-36
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume18
Issue number1
DOIs
StatePublished - Jan 1 2000

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Low-permittivity nanocomposite materials using sculptured thin film technology'. Together they form a unique fingerprint.

  • Cite this