Low pressure chemical vapor deposition synthesis of hexagonal boron nitride on polycrystalline metal foils

Ashley Gibb, Nasim Alem, Alex Zettl

Research output: Contribution to journalArticle

13 Scopus citations

Abstract

The two-dimensional sp2-bonded material hexagonal boron nitride (h-BN) has unique electronic, thermal, mechanical, and chemical properties. It has recently found use as an ideal substrate for graphene-based electronic devices. We here describe synthesis of mono- to few-layer h-BN films using low pressure chemical vapor deposition (LPCVD) from borazine, with nickel, copper and platinum employed as catalytic substrates, and transfer of some of these fi{ligature}lms using a non-polymer method. Characterization of the films via Raman spectroscopy and transmission electron microscopy (TEM) is performed. Chemical vapor deposition synthesis of hexagonal boron nitride from borazine using metallic substrates.

Original languageEnglish (US)
Pages (from-to)2727-2731
Number of pages5
JournalPhysica Status Solidi (B) Basic Research
Volume250
Issue number12
DOIs
StatePublished - Dec 2013

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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