Macro-modeling of systems including free-space optical MEMS

Timothy Kurzweg, Arthur S. Morris

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Scopus citations

Abstract

One barrier to the integration of MEMS devices into optical systems is the lack of a system-level CAD tool allowing the optimization of MOEMS designs simultaneously with embedding control electronics. Our work addresses this issue by integrating extracted electro-mechanical macro-models for MEMS devices and optical macro-models based on Gaussian beam optics into a system-level simulation tool. Microcosm's MEMCAD includes MEMSys, a Saber based package used to simulate and analyze mixed electrical, mechanical, and fluidic systems. We have added an optical domain to this framework. In this paper, we introduce this optical system-level modeling concept in both theory and through the simulation of an optical MEMS noise suppression system.

Original languageEnglish (US)
Title of host publication2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000
EditorsM. Laudon, B. Romanowicz
Pages146-149
Number of pages4
StatePublished - Dec 1 2000
Event2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000 - San Diego, CA, United States
Duration: Mar 27 2000Mar 29 2000

Publication series

Name2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Conference

Conference2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000
CountryUnited States
CitySan Diego, CA
Period3/27/003/29/00

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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