Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications

Gokhan Hatipoglu, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper demonstrates a micromachined magnetoelectric (ME) resonator based magnetometer capable of sensing μOe magnetic fields. The device consists of ∼7.5 μm thick (223 MHz) AT-cut quartz bulk acoustic wave, plate-resonator on which 500 nm thick magnetostrictive Metglas® film is deposited. Application of magnetic fields induces flexural bending in the plate resonator unimorph structure which results in a shift of the resonance frequency. The ultrathin micromachined quartz plate resonator fabricated here showed a sensitivity of ∼800 μ Oe.

Original languageEnglish (US)
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages807-810
Number of pages4
ISBN (Electronic)9781479989553
DOIs
StatePublished - Aug 5 2015
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: Jun 21 2015Jun 25 2015

Other

Other18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
CountryUnited States
CityAnchorage
Period6/21/156/25/15

Fingerprint

flexing
Resonators
resonators
Magnetic fields
magnetic fields
Quartz
quartz
Magnetometers
magnetometers
Acoustic waves
acoustics
sensitivity
shift

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Hatipoglu, G., & Tadigadapa, S. A. (2015). Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 807-810). [7181046] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181046
Hatipoglu, Gokhan ; Tadigadapa, Srinivas A. / Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 807-810
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title = "Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications",
abstract = "This paper demonstrates a micromachined magnetoelectric (ME) resonator based magnetometer capable of sensing μOe magnetic fields. The device consists of ∼7.5 μm thick (223 MHz) AT-cut quartz bulk acoustic wave, plate-resonator on which 500 nm thick magnetostrictive Metglas{\circledR} film is deposited. Application of magnetic fields induces flexural bending in the plate resonator unimorph structure which results in a shift of the resonance frequency. The ultrathin micromachined quartz plate resonator fabricated here showed a sensitivity of ∼800 μ Oe.",
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Hatipoglu, G & Tadigadapa, SA 2015, Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7181046, Institute of Electrical and Electronics Engineers Inc., pp. 807-810, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 6/21/15. https://doi.org/10.1109/TRANSDUCERS.2015.7181046

Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications. / Hatipoglu, Gokhan; Tadigadapa, Srinivas A.

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 807-810 7181046.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - This paper demonstrates a micromachined magnetoelectric (ME) resonator based magnetometer capable of sensing μOe magnetic fields. The device consists of ∼7.5 μm thick (223 MHz) AT-cut quartz bulk acoustic wave, plate-resonator on which 500 nm thick magnetostrictive Metglas® film is deposited. Application of magnetic fields induces flexural bending in the plate resonator unimorph structure which results in a shift of the resonance frequency. The ultrathin micromachined quartz plate resonator fabricated here showed a sensitivity of ∼800 μ Oe.

AB - This paper demonstrates a micromachined magnetoelectric (ME) resonator based magnetometer capable of sensing μOe magnetic fields. The device consists of ∼7.5 μm thick (223 MHz) AT-cut quartz bulk acoustic wave, plate-resonator on which 500 nm thick magnetostrictive Metglas® film is deposited. Application of magnetic fields induces flexural bending in the plate resonator unimorph structure which results in a shift of the resonance frequency. The ultrathin micromachined quartz plate resonator fabricated here showed a sensitivity of ∼800 μ Oe.

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Hatipoglu G, Tadigadapa SA. Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 807-810. 7181046 https://doi.org/10.1109/TRANSDUCERS.2015.7181046