Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications

Gokhan Hatipoglu, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper demonstrates a micromachined magnetoelectric (ME) resonator based magnetometer capable of sensing μOe magnetic fields. The device consists of ∼7.5 μm thick (223 MHz) AT-cut quartz bulk acoustic wave, plate-resonator on which 500 nm thick magnetostrictive Metglas® film is deposited. Application of magnetic fields induces flexural bending in the plate resonator unimorph structure which results in a shift of the resonance frequency. The ultrathin micromachined quartz plate resonator fabricated here showed a sensitivity of ∼800 μ Oe.

Original languageEnglish (US)
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages807-810
Number of pages4
ISBN (Electronic)9781479989553
DOIs
StatePublished - Aug 5 2015
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: Jun 21 2015Jun 25 2015

Other

Other18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
CountryUnited States
CityAnchorage
Period6/21/156/25/15

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All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Hatipoglu, G., & Tadigadapa, S. A. (2015). Magnetostrictively induced flexure in a micromachined plate resonator for magnetic field sensing applications. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 807-810). [7181046] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181046