Mass spectrometry study during the vapor deposition of poly-para-xylylene thin films

J. B. Fortin, T. M. Lu

Research output: Contribution to journalConference article

31 Citations (Scopus)

Abstract

The vapor species present in the deposition chamber during the vapor deposition of poly-para-xylylene (Parylene) thin films was analyzed using a differentially pumped quadrupole mass spectrometer (DPQMS). The partial pressure in the deposition chamber of volatile contamination originating in the dimer source, di-para-xylylene, was determined. The magnitude of the contamination was determined and its mass spectrum was analyzed using the DPQMS. Fragmentation patterns for the monomer were determined as a function of quadruple mass spectrometer (QMS) ionizing electron energy for energies ranging from 25 to 105 eV.

Original languageEnglish (US)
Pages (from-to)2459-2465
Number of pages7
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume18
Issue number5
DOIs
StatePublished - Sep 1 2000
Event47th International Symposium: Vacuum, Thin Films, Surfaces/Interfaces, and Processing - Boston, USA
Duration: Oct 2 2000Oct 6 2000

Fingerprint

Vapor deposition
Mass spectrometers
mass spectrometers
Mass spectrometry
mass spectroscopy
vapor deposition
Thin films
contamination
Contamination
thin films
quadrupoles
chambers
Dimers
Partial pressure
mass spectra
partial pressure
fragmentation
monomers
Monomers
Vapors

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Cite this

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abstract = "The vapor species present in the deposition chamber during the vapor deposition of poly-para-xylylene (Parylene) thin films was analyzed using a differentially pumped quadrupole mass spectrometer (DPQMS). The partial pressure in the deposition chamber of volatile contamination originating in the dimer source, di-para-xylylene, was determined. The magnitude of the contamination was determined and its mass spectrum was analyzed using the DPQMS. Fragmentation patterns for the monomer were determined as a function of quadruple mass spectrometer (QMS) ionizing electron energy for energies ranging from 25 to 105 eV.",
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Mass spectrometry study during the vapor deposition of poly-para-xylylene thin films. / Fortin, J. B.; Lu, T. M.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 18, No. 5, 01.09.2000, p. 2459-2465.

Research output: Contribution to journalConference article

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