Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect

F. Xu, F. Chu, J. F. Shepard, Susan E. Trolier-McKinstry

Research output: Contribution to journalConference article

10 Scopus citations

Abstract

This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d33 values of ≈ 5 pC/N, while poled films have values up to 220 pC/N.

Original languageEnglish (US)
Pages (from-to)427-432
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume493
StatePublished - Jan 1 1998
EventProceedings of the 1997 MRS Fall Symposium - Boston, MA, USA
Duration: Nov 30 1997Dec 4 1997

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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