Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect

F. Xu, F. Chu, J. F. Shepard, Susan E. Trolier-McKinstry

Research output: Contribution to journalConference article

10 Citations (Scopus)

Abstract

This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d33 values of ≈ 5 pC/N, while poled films have values up to 220 pC/N.

Original languageEnglish (US)
Pages (from-to)427-432
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume493
StatePublished - Jan 1 1998
EventProceedings of the 1997 MRS Fall Symposium - Boston, MA, USA
Duration: Nov 30 1997Dec 4 1997

Fingerprint

Piezoelectricity
Thin films
coefficients
thin films
integrators
Sol-gels
Gases
gels
Processing
gases

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

@article{7743735acc7741f88c65ee6e795bef80,
title = "Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect",
abstract = "This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d33 values of ≈ 5 pC/N, while poled films have values up to 220 pC/N.",
author = "F. Xu and F. Chu and Shepard, {J. F.} and Trolier-McKinstry, {Susan E.}",
year = "1998",
month = "1",
day = "1",
language = "English (US)",
volume = "493",
pages = "427--432",
journal = "Materials Research Society Symposium - Proceedings",
issn = "0272-9172",
publisher = "Materials Research Society",

}

Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect. / Xu, F.; Chu, F.; Shepard, J. F.; Trolier-McKinstry, Susan E.

In: Materials Research Society Symposium - Proceedings, Vol. 493, 01.01.1998, p. 427-432.

Research output: Contribution to journalConference article

TY - JOUR

T1 - Measurement of effective longitudinal piezoelectric coefficient of thin films by direct piezoelectric effect

AU - Xu, F.

AU - Chu, F.

AU - Shepard, J. F.

AU - Trolier-McKinstry, Susan E.

PY - 1998/1/1

Y1 - 1998/1/1

N2 - This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d33 values of ≈ 5 pC/N, while poled films have values up to 220 pC/N.

AB - This paper presents a new method for the measurement of the longitudinal piezoelectric coefficient of piezoelectric thin films using the direct piezoelectric effect. A uniform uniaxial stress was applied to the piezoelectric thin film by high-pressure gas and the induced charge was collected and measured by a charge integrator. The effective longitudinal piezoelectric coefficient of lead zirconate titanate (PZT) 52/48 thin films made by sol-gel processing was measured by this method. Undoped films typically have d33 values of ≈ 5 pC/N, while poled films have values up to 220 pC/N.

UR - http://www.scopus.com/inward/record.url?scp=0031679766&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031679766&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0031679766

VL - 493

SP - 427

EP - 432

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

SN - 0272-9172

ER -