Mechanical design of a precision instrument for measuring the roundness profiles of micro shafts

Neil Loychik, Mathieu Barraja, Afzal Khan, R. Ryan Vallance, Eric Russell Marsh, Dave A. Arneson

    Research output: Contribution to conferencePaper

    2 Citations (Scopus)

    Abstract

    This paper presents a new instrument for measuring roundness profiles of axially symmetric micro shafts with diameters below 250 micrometers. The instrument will measure form error in cutting tools used for micro machining, small-hole metrology probes, and other high aspect ratio micro structures. This instrument operates on the same physical principle as scanning tunneling microscopes, which measure surface topography using fluctuations in tunneling of electrons between probe and sample. The instrument will measure roundness profiles using a fixed-sensitive-direction arrangement of the detector, similar to macro scale metrology instruments. Challenges resulting from dimensional scaling necessitate an entirely new instrument compared to conventional instruments. We describe the need for this instrument, its working principle, architecture, the design of the traction drive mechanism, and the design of the nano positioning stages.

    Original languageEnglish (US)
    StatePublished - Nov 28 2006
    EventInternational Conference on Manufacturing Science and Engineering, MSEC 2006 - Ypsilanti, MI, United States
    Duration: Oct 8 2006Oct 11 2006

    Other

    OtherInternational Conference on Manufacturing Science and Engineering, MSEC 2006
    CountryUnited States
    CityYpsilanti, MI
    Period10/8/0610/11/06

    Fingerprint

    Surface topography
    Cutting tools
    Macros
    Aspect ratio
    Machining
    Microscopes
    Detectors
    Scanning
    Microstructure
    Electrons

    All Science Journal Classification (ASJC) codes

    • Engineering(all)

    Cite this

    Loychik, N., Barraja, M., Khan, A., Vallance, R. R., Marsh, E. R., & Arneson, D. A. (2006). Mechanical design of a precision instrument for measuring the roundness profiles of micro shafts. Paper presented at International Conference on Manufacturing Science and Engineering, MSEC 2006, Ypsilanti, MI, United States.
    Loychik, Neil ; Barraja, Mathieu ; Khan, Afzal ; Vallance, R. Ryan ; Marsh, Eric Russell ; Arneson, Dave A. / Mechanical design of a precision instrument for measuring the roundness profiles of micro shafts. Paper presented at International Conference on Manufacturing Science and Engineering, MSEC 2006, Ypsilanti, MI, United States.
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    abstract = "This paper presents a new instrument for measuring roundness profiles of axially symmetric micro shafts with diameters below 250 micrometers. The instrument will measure form error in cutting tools used for micro machining, small-hole metrology probes, and other high aspect ratio micro structures. This instrument operates on the same physical principle as scanning tunneling microscopes, which measure surface topography using fluctuations in tunneling of electrons between probe and sample. The instrument will measure roundness profiles using a fixed-sensitive-direction arrangement of the detector, similar to macro scale metrology instruments. Challenges resulting from dimensional scaling necessitate an entirely new instrument compared to conventional instruments. We describe the need for this instrument, its working principle, architecture, the design of the traction drive mechanism, and the design of the nano positioning stages.",
    author = "Neil Loychik and Mathieu Barraja and Afzal Khan and Vallance, {R. Ryan} and Marsh, {Eric Russell} and Arneson, {Dave A.}",
    year = "2006",
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    note = "International Conference on Manufacturing Science and Engineering, MSEC 2006 ; Conference date: 08-10-2006 Through 11-10-2006",

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    Loychik, N, Barraja, M, Khan, A, Vallance, RR, Marsh, ER & Arneson, DA 2006, 'Mechanical design of a precision instrument for measuring the roundness profiles of micro shafts' Paper presented at International Conference on Manufacturing Science and Engineering, MSEC 2006, Ypsilanti, MI, United States, 10/8/06 - 10/11/06, .

    Mechanical design of a precision instrument for measuring the roundness profiles of micro shafts. / Loychik, Neil; Barraja, Mathieu; Khan, Afzal; Vallance, R. Ryan; Marsh, Eric Russell; Arneson, Dave A.

    2006. Paper presented at International Conference on Manufacturing Science and Engineering, MSEC 2006, Ypsilanti, MI, United States.

    Research output: Contribution to conferencePaper

    TY - CONF

    T1 - Mechanical design of a precision instrument for measuring the roundness profiles of micro shafts

    AU - Loychik, Neil

    AU - Barraja, Mathieu

    AU - Khan, Afzal

    AU - Vallance, R. Ryan

    AU - Marsh, Eric Russell

    AU - Arneson, Dave A.

    PY - 2006/11/28

    Y1 - 2006/11/28

    N2 - This paper presents a new instrument for measuring roundness profiles of axially symmetric micro shafts with diameters below 250 micrometers. The instrument will measure form error in cutting tools used for micro machining, small-hole metrology probes, and other high aspect ratio micro structures. This instrument operates on the same physical principle as scanning tunneling microscopes, which measure surface topography using fluctuations in tunneling of electrons between probe and sample. The instrument will measure roundness profiles using a fixed-sensitive-direction arrangement of the detector, similar to macro scale metrology instruments. Challenges resulting from dimensional scaling necessitate an entirely new instrument compared to conventional instruments. We describe the need for this instrument, its working principle, architecture, the design of the traction drive mechanism, and the design of the nano positioning stages.

    AB - This paper presents a new instrument for measuring roundness profiles of axially symmetric micro shafts with diameters below 250 micrometers. The instrument will measure form error in cutting tools used for micro machining, small-hole metrology probes, and other high aspect ratio micro structures. This instrument operates on the same physical principle as scanning tunneling microscopes, which measure surface topography using fluctuations in tunneling of electrons between probe and sample. The instrument will measure roundness profiles using a fixed-sensitive-direction arrangement of the detector, similar to macro scale metrology instruments. Challenges resulting from dimensional scaling necessitate an entirely new instrument compared to conventional instruments. We describe the need for this instrument, its working principle, architecture, the design of the traction drive mechanism, and the design of the nano positioning stages.

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    M3 - Paper

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    Loychik N, Barraja M, Khan A, Vallance RR, Marsh ER, Arneson DA. Mechanical design of a precision instrument for measuring the roundness profiles of micro shafts. 2006. Paper presented at International Conference on Manufacturing Science and Engineering, MSEC 2006, Ypsilanti, MI, United States.