TY - JOUR
T1 - Mechanical failure dependence on the electrical history of lead zirconate titanate thin films
AU - Coleman, K.
AU - Ritter, M.
AU - Bermejo, R.
AU - Trolier-McKinstry, S.
N1 - Funding Information:
This manuscript is based on work supported by the National Science Foundation, as part of the Center for Dielectrics and Piezoelectrics under Grant Nos. IIP-1841453, and IIP-1841466. The authors would also like to acknowledge Trevor Clark at the Materials Characterization Lab at Penn State for taking the FIB images.
Funding Information:
This manuscript is based on work supported by the National Science Foundation , as part of the Center for Dielectrics and Piezoelectrics under Grant Nos. IIP-1841453 , and IIP-1841466 . The authors would also like to acknowledge Trevor Clark at the Materials Characterization Lab at Penn State for taking the FIB images.
Publisher Copyright:
© 2020 Elsevier Ltd
PY - 2021/4
Y1 - 2021/4
N2 - Piezoelectric micromechanical systems (piezoMEMS) are often subjected to harsh mechanical and electrical loads during operation. This study evaluates the effects of the electrical history of a lead zirconate titanate (PZT) layer on the electro-mechanical response and structural limits of multilayer stacks. Electro-mechanical characterization was performed under biaxial bending employing the Ball-on-three Balls (B3B) test on virgin, poled, and DC biased (80 kV/cm) samples. No significant effect on the characteristic strength or Weibull modulus of the stack was observed. However, the crack initiation stress was highest for the virgin samples (σ0 ∼ 485 ± 30 MPa); this decreased for both poled samples (σ0 ∼ 410 ± 30 MPa), and samples measured under 80 kV/cm (σ0 ∼ 433 ± 30 MPa). in situ εr and loss tangent measurements suggested electromechanical loading conditions can destabilize the domain structure. Overall, the electrical history and electromechanical loading conditions can reduce the PZT film's fracture resistance.
AB - Piezoelectric micromechanical systems (piezoMEMS) are often subjected to harsh mechanical and electrical loads during operation. This study evaluates the effects of the electrical history of a lead zirconate titanate (PZT) layer on the electro-mechanical response and structural limits of multilayer stacks. Electro-mechanical characterization was performed under biaxial bending employing the Ball-on-three Balls (B3B) test on virgin, poled, and DC biased (80 kV/cm) samples. No significant effect on the characteristic strength or Weibull modulus of the stack was observed. However, the crack initiation stress was highest for the virgin samples (σ0 ∼ 485 ± 30 MPa); this decreased for both poled samples (σ0 ∼ 410 ± 30 MPa), and samples measured under 80 kV/cm (σ0 ∼ 433 ± 30 MPa). in situ εr and loss tangent measurements suggested electromechanical loading conditions can destabilize the domain structure. Overall, the electrical history and electromechanical loading conditions can reduce the PZT film's fracture resistance.
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U2 - 10.1016/j.jeurceramsoc.2020.11.002
DO - 10.1016/j.jeurceramsoc.2020.11.002
M3 - Article
AN - SCOPUS:85097073151
SN - 0955-2219
VL - 41
SP - 2465
EP - 2471
JO - Journal of the European Ceramic Society
JF - Journal of the European Ceramic Society
IS - 4
ER -