MEMS flextensional actuator using lead zirconate titanate thin film

H. G. Yu, Srinivas A. Tadigadapa, Susan E. Trolier-McKinstry

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

Piezoelectric flextensional microactuators have been designed and fabricated using silicon micromachining techniques. A lead zirconate titanate (PZT) thin film is used as the piezoelectric actuator material. A fabrication process using five photolithography steps and a final release step has been developed. Static displacement of the actuators was measured using a white light interference microscope. Displacements in the range of 2.3-12.7 μm at 200 kV/cm for actuators with four different lengths were measured. From these measurements an amplification factor of 1.5 compared to unimorph actuator was deduced. Corresponding resonance frequencies in the range of 407- 32.6 kHz were obtained using an Agilent 4294A impedance analyzer in a vacuum ambient of 5×10 -4 mbar.

Original languageEnglish (US)
Article numberTPa33
Pages (from-to)375-378
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
StatePublished - 2005

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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