MEMS stage and piezoelectric motor-controlled TEM holder for quantitative in-situ testing of thin film specimens

Scott Robinson, Glenn Fried, Aman Haque

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)1274-1275
Number of pages2
JournalMicroscopy and Microanalysis
Volume8
Issue numberSUPPL. 2
StatePublished - Nov 20 2002

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Piezoelectric motors
piezoelectric motors
holders
microelectromechanical systems
MEMS
Transmission electron microscopy
Thin films
transmission electron microscopy
Testing
thin films

All Science Journal Classification (ASJC) codes

  • Instrumentation

Cite this

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title = "MEMS stage and piezoelectric motor-controlled TEM holder for quantitative in-situ testing of thin film specimens",
author = "Scott Robinson and Glenn Fried and Aman Haque",
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MEMS stage and piezoelectric motor-controlled TEM holder for quantitative in-situ testing of thin film specimens. / Robinson, Scott; Fried, Glenn; Haque, Aman.

In: Microscopy and Microanalysis, Vol. 8, No. SUPPL. 2, 20.11.2002, p. 1274-1275.

Research output: Contribution to journalArticle

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