MEMS technology for the advancement of science

D. López, F. Pardo, C. Bolle, R. S. Decca, D. Bishop

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Abstract

In this article we describe the basic principles, advantages and limitations of Microelectromechanical systems (MEMS) technology. We present examples of experiments in which micromachines are used to do physical measurements that could not be done before. MEMS are miniature mechanical devices with micrometer size movable parts. These devices are playing key roles in many important areas, including health care, transportation, communications, defense systems and a wide array of consumer products. They are an emerging technology, which, when applied to the field of physical sensors, offers not only an obvious advantage of being small and cheap, but more importantly, provides some unique experimental opportunities.

Original languageEnglish (US)
Pages (from-to)51-62
Number of pages12
JournalJournal of Low Temperature Physics
Volume135
Issue number1-2
DOIs
StatePublished - Apr 2004

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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