METODA OKRESLANIA GESTOSCI LADUNKU POWIERZCHNIOWEGO ULTRACIENKICH WARSTW DIELEKTRYCZNYCH NA PODLOZU POLPRZEWODNIKOWYM.

Translated title of the contribution: Method for Determining the Surface Charge Density of Ultra-Thin Dielectric Layers on a Semiconductor Substrate.

Jerzy Ruzyllo, Andrzej Jakubowski

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

A method is presented which allows the determination of density of charge induced by the potential of a metal electrode on the surface of an ultra-thin dielectric layer on a semiconductor substrate. The value of the determined charge density is a measure of ultra-thin dielectric layer surface conductivity. The proposed method can be used in conjunction with the fabrication of ultra-thin SiO//2 layers on a silicon substrate.

Translated title of the contributionMethod for Determining the Surface Charge Density of Ultra-Thin Dielectric Layers on a Semiconductor Substrate.
Original languagePolish
Pages (from-to)725-727
Number of pages3
JournalArch Elektrotech (Warsaw)
Volume27
Issue number3
StatePublished - Jan 1 1978

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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