METODA OKRESLANIA GESTOSCI LADUNKU POWIERZCHNIOWEGO ULTRACIENKICH WARSTW DIELEKTRYCZNYCH NA PODLOZU POLPRZEWODNIKOWYM.

Translated title of the contribution: Method for Determining the Surface Charge Density of Ultra-Thin Dielectric Layers on a Semiconductor Substrate.

Jerzy Ruzyllo, Andrzej Jakubowski

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A method is presented which allows the determination of density of charge induced by the potential of a metal electrode on the surface of an ultra-thin dielectric layer on a semiconductor substrate. The value of the determined charge density is a measure of ultra-thin dielectric layer surface conductivity. The proposed method can be used in conjunction with the fabrication of ultra-thin SiO//2 layers on a silicon substrate.

Original languagePolish
Pages (from-to)725-727
Number of pages3
JournalArch Elektrotech (Warsaw)
Volume27
Issue number3
StatePublished - Jan 1 1978

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Surface charge
Charge density
Semiconductor materials
Substrates
Fabrication
Silicon
Electrodes
Metals

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

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title = "METODA OKRESLANIA GESTOSCI LADUNKU POWIERZCHNIOWEGO ULTRACIENKICH WARSTW DIELEKTRYCZNYCH NA PODLOZU POLPRZEWODNIKOWYM.",
abstract = "A method is presented which allows the determination of density of charge induced by the potential of a metal electrode on the surface of an ultra-thin dielectric layer on a semiconductor substrate. The value of the determined charge density is a measure of ultra-thin dielectric layer surface conductivity. The proposed method can be used in conjunction with the fabrication of ultra-thin SiO//2 layers on a silicon substrate.",
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year = "1978",
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journal = "Archives of Electrical Engineering",
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METODA OKRESLANIA GESTOSCI LADUNKU POWIERZCHNIOWEGO ULTRACIENKICH WARSTW DIELEKTRYCZNYCH NA PODLOZU POLPRZEWODNIKOWYM. / Ruzyllo, Jerzy; Jakubowski, Andrzej.

In: Arch Elektrotech (Warsaw), Vol. 27, No. 3, 01.01.1978, p. 725-727.

Research output: Contribution to journalArticle

TY - JOUR

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AU - Jakubowski, Andrzej

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