Microelectromechanical system pressure sensor and method for making and using

Research output: Patent

Abstract

According to some embodiments, an apparatus includes a substrate that defines a plane. The apparatus also includes a first conducting plate that is substantially normal to the substrate and a second conducting plate that is (i) substantially normal to the substrate and (ii) deformable in response to a pressure.
Original languageEnglish (US)
Patent numberUS7296476B2
StatePublished - Nov 20 2007

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